二极管温度传感器碱基耗尽区的杂质分布

IF 0.6 4区物理与天体物理 Q4 PHYSICS, APPLIED

Low Temperature Physics Pub Date : 2024-05-01 DOI:10.1063/10.0025635

R. R. Bebitov, O. A. Abdulkhaev, D. M. Yodgorova, D. B. Istamov, Sh. M. Kuliyev, A. A. Khakimov, A. B. Bobonazarov, A. Z. Rakhmatov

{"title":"二极管温度传感器碱基耗尽区的杂质分布","authors":"R. R. Bebitov, O. A. Abdulkhaev, D. M. Yodgorova, D. B. Istamov, Sh. M. Kuliyev, A. A. Khakimov, A. B. Bobonazarov, A. Z. Rakhmatov","doi":"10.1063/10.0025635","DOIUrl":null,"url":null,"abstract":"The performance of diode temperature sensors depends on their base-depleted region thickness and impurity distribution profile. In this article, we study the boron diffusion process in the thin base region with a thickness of about 1 μm. We show that, for the proposed p+–n–p temperature sensor structure, the impurity distribution in the n region has the form of an asymmetric parabola, with an extreme concentration point shifted towards the “upper” p+ region.","PeriodicalId":18077,"journal":{"name":"Low Temperature Physics","volume":null,"pages":null},"PeriodicalIF":0.6000,"publicationDate":"2024-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Distribution of impurities in base-depleted region of diode temperature sensor\",\"authors\":\"R. R. Bebitov, O. A. Abdulkhaev, D. M. Yodgorova, D. B. Istamov, Sh. M. Kuliyev, A. A. Khakimov, A. B. Bobonazarov, A. Z. Rakhmatov\",\"doi\":\"10.1063/10.0025635\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The performance of diode temperature sensors depends on their base-depleted region thickness and impurity distribution profile. In this article, we study the boron diffusion process in the thin base region with a thickness of about 1 μm. We show that, for the proposed p+–n–p temperature sensor structure, the impurity distribution in the n region has the form of an asymmetric parabola, with an extreme concentration point shifted towards the “upper” p+ region.\",\"PeriodicalId\":18077,\"journal\":{\"name\":\"Low Temperature Physics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.6000,\"publicationDate\":\"2024-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Low Temperature Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1063/10.0025635\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Low Temperature Physics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1063/10.0025635","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}

引用次数: 0

摘要

二极管温度传感器的性能取决于其基极薄区的厚度和杂质分布状况。本文研究了厚度约为 1 μm 的薄基区中的硼扩散过程。我们发现，对于所提出的 p+-n-p 温度传感器结构，n 区的杂质分布呈不对称抛物线形式，极端浓度点偏向 "上部 "p+ 区。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Distribution of impurities in base-depleted region of diode temperature sensor

The performance of diode temperature sensors depends on their base-depleted region thickness and impurity distribution profile. In this article, we study the boron diffusion process in the thin base region with a thickness of about 1 μm. We show that, for the proposed p+–n–p temperature sensor structure, the impurity distribution in the n region has the form of an asymmetric parabola, with an extreme concentration point shifted towards the “upper” p+ region.

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来源期刊

Low Temperature Physics 物理-物理：应用

CiteScore

1.20

自引率

25.00%

发文量

138

审稿时长

3 months

期刊介绍： Guided by an international editorial board, Low Temperature Physics (LTP) communicates the results of important experimental and theoretical studies conducted at low temperatures. LTP offers key work in such areas as superconductivity, magnetism, lattice dynamics, quantum liquids and crystals, cryocrystals, low-dimensional and disordered systems, electronic properties of normal metals and alloys, and critical phenomena. The journal publishes original articles on new experimental and theoretical results as well as review articles, brief communications, memoirs, and biographies. Low Temperature Physics, a translation of the copyrighted Journal FIZIKA NIZKIKH TEMPERATUR, is a monthly journal containing English reports of current research in the field of the low temperature physics. The translation began with the 1975 issues. One volume is published annually beginning with the January issues.