Wenyong Zhao, Hong Zhou, Jiahao Li, Yuchen Lu, Yuqiang Ding
{"title":"不对称 La β-二酮酸酯的合成、表征、热性能及其在 La2O3 薄膜 ALD 前体中的应用","authors":"Wenyong Zhao, Hong Zhou, Jiahao Li, Yuchen Lu, Yuqiang Ding","doi":"10.1007/s11243-024-00583-w","DOIUrl":null,"url":null,"abstract":"<div><p>In this paper, three complexes La<sub>2</sub>(thd)<sub>6</sub> (thd = 2,2,6,6-tetramethyl-3,5-heptanedione, <b>1</b>)<sub>,</sub> La<sub>2</sub>(tmod)<sub>6</sub> (tmod = 2,2,6,6-tetramethyl octane-3, 5-dionates, <b>2</b>) and La<sub>2</sub>(ibpm)<sub>6</sub> (ibpm = 2,2,6-trimethyl-3, 5-heptane-dionates, <b>3</b>) were synthesized by one-step method and characterized with <sup>1</sup>H-NMR, <sup>13</sup>C-NMR and X-ray single-crystal diffraction. The melting point and TGA data demonstrated that the asymmetry of the ligand and the number of flexible joints could improve the volatility of the complex. With the help of asymmetry and flexible joint, La<sub>2</sub>(tmod)<sub>6</sub> was selected as ALD precursor to deposit La<sub>2</sub>O<sub>3</sub> film on SiO<sub>2</sub>/Si (100) wafer. The self-limited deposition results demonstrated that La<sub>2</sub>(tmod)<sub>6</sub> is better precursor than reported La<sub>2</sub>(thd)<sub>6</sub> and La(thd)<sub>3</sub>-DMEA (DMEA = <i>N</i>,<i>N</i>-dimethylethylenediamine).</p></div>","PeriodicalId":1,"journal":{"name":"Accounts of Chemical Research","volume":null,"pages":null},"PeriodicalIF":16.4000,"publicationDate":"2024-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The syntheses, characterization, thermal properties of asymmetrical La β-diketonate and their application as ALD precursor for La2O3 films\",\"authors\":\"Wenyong Zhao, Hong Zhou, Jiahao Li, Yuchen Lu, Yuqiang Ding\",\"doi\":\"10.1007/s11243-024-00583-w\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>In this paper, three complexes La<sub>2</sub>(thd)<sub>6</sub> (thd = 2,2,6,6-tetramethyl-3,5-heptanedione, <b>1</b>)<sub>,</sub> La<sub>2</sub>(tmod)<sub>6</sub> (tmod = 2,2,6,6-tetramethyl octane-3, 5-dionates, <b>2</b>) and La<sub>2</sub>(ibpm)<sub>6</sub> (ibpm = 2,2,6-trimethyl-3, 5-heptane-dionates, <b>3</b>) were synthesized by one-step method and characterized with <sup>1</sup>H-NMR, <sup>13</sup>C-NMR and X-ray single-crystal diffraction. The melting point and TGA data demonstrated that the asymmetry of the ligand and the number of flexible joints could improve the volatility of the complex. With the help of asymmetry and flexible joint, La<sub>2</sub>(tmod)<sub>6</sub> was selected as ALD precursor to deposit La<sub>2</sub>O<sub>3</sub> film on SiO<sub>2</sub>/Si (100) wafer. The self-limited deposition results demonstrated that La<sub>2</sub>(tmod)<sub>6</sub> is better precursor than reported La<sub>2</sub>(thd)<sub>6</sub> and La(thd)<sub>3</sub>-DMEA (DMEA = <i>N</i>,<i>N</i>-dimethylethylenediamine).</p></div>\",\"PeriodicalId\":1,\"journal\":{\"name\":\"Accounts of Chemical Research\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":16.4000,\"publicationDate\":\"2024-05-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Accounts of Chemical Research\",\"FirstCategoryId\":\"92\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s11243-024-00583-w\",\"RegionNum\":1,\"RegionCategory\":\"化学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Accounts of Chemical Research","FirstCategoryId":"92","ListUrlMain":"https://link.springer.com/article/10.1007/s11243-024-00583-w","RegionNum":1,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
The syntheses, characterization, thermal properties of asymmetrical La β-diketonate and their application as ALD precursor for La2O3 films
In this paper, three complexes La2(thd)6 (thd = 2,2,6,6-tetramethyl-3,5-heptanedione, 1), La2(tmod)6 (tmod = 2,2,6,6-tetramethyl octane-3, 5-dionates, 2) and La2(ibpm)6 (ibpm = 2,2,6-trimethyl-3, 5-heptane-dionates, 3) were synthesized by one-step method and characterized with 1H-NMR, 13C-NMR and X-ray single-crystal diffraction. The melting point and TGA data demonstrated that the asymmetry of the ligand and the number of flexible joints could improve the volatility of the complex. With the help of asymmetry and flexible joint, La2(tmod)6 was selected as ALD precursor to deposit La2O3 film on SiO2/Si (100) wafer. The self-limited deposition results demonstrated that La2(tmod)6 is better precursor than reported La2(thd)6 and La(thd)3-DMEA (DMEA = N,N-dimethylethylenediamine).
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Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance.
Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.
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