激光损伤 β-Ga2O3 的光致发光绘图

IF 1.8 4区材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

MRS Communications Pub Date : 2024-05-13 DOI:10.1557/s43579-024-00564-1

Jesse Huso, Matthew D. McCluskey, John S. McCloy, Arkka Bhattacharyya, Sriram Krishnamoorthy, Clint D. Frye, Joel B. Varley, Lars F. Voss

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引用次数: 0

摘要

利用光致发光（PL）绘图研究了 1064 nm 激光脉冲对 β-Ga2O3 外延层造成的破坏。确定了本征紫外波段的强度和位置，并绘制成假彩色图像。确定了两种类型的损伤：圆形损伤和损伤裂缝。圆形损伤显示出比周围材料更低的紫外可见光强度，颜色中心在损伤区域周围形成 "光晕"。损伤裂纹与 a 轴和 c 轴对齐，显示出比未损坏材料更高的紫外可见光强度。紫外波段能量的变化揭示了未加工材料中的缺陷。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Photoluminescence mapping of laser-damaged β-Ga2O3

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Photoluminescence mapping of laser-damaged β-Ga2O3

Photoluminescence (PL) mapping was utilized to investigate damage in β-Ga₂O₃ epilayers induced by 1064 nm laser pulses. The intensity and position of the intrinsic UV band were determined and plotted as a false-color image. Two types of damage were identified: circular damage and damage cracks. Circular damage shows lower UV PL intensity than the surrounding material with color centers in a “halo” around the damaged region. Damage cracks are aligned with the a and c axes and show higher PL intensity than undamaged material. Defects in the as-grown material were revealed by shifts in the UV band energy.

Graphical abstract

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来源期刊

MRS Communications MATERIALS SCIENCE, MULTIDISCIPLINARY-

CiteScore

2.60

自引率

10.50%

发文量

166

审稿时长

>12 weeks

期刊介绍： MRS Communications is a full-color, high-impact journal focused on rapid publication of completed research with broad appeal to the materials community. MRS Communications offers a rapid but rigorous peer-review process and time to publication. Leveraging its access to the far-reaching technical expertise of MRS members and leading materials researchers from around the world, the journal boasts an experienced and highly respected board of principal editors and reviewers.