碳含量对直流磁控溅射 TiBCN 涂层相结构和机械性能的影响

IF 3.6 4区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Reviews on Advanced Materials Science Pub Date : 2024-04-29 DOI:10.1515/rams-2024-0013

Anand Vyas, Ahmed Aliyu, Gary Chi-Pong Tsui

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引用次数: 0

摘要

本研究采用非平衡直流磁控溅射技术在硅（100）晶片上形成 TiBCN 涂层。通过改变碳（C）的浓度来调节涂层的相结构和机械性能。使用拉曼光谱、扫描电子显微镜、X 射线衍射、X 射线光电子能谱和纳米压痕法对涂层进行了分析。结果显示，C 浓度为 4.4 at.% 的 TiBCN-2 涂层的最佳硬度和弹性模量值分别为 33 和 291 GPa。另一方面，随着 C 含量从 4.4% 增加到 24.4%，涂层的硬度和弹性模量值分别下降到 21 和 225 GPa，原因是涂层基体中形成了氮化硼和碳相。因此，加入理想的碳浓度可以大大改善 TiBCN 涂层的性能，从而使涂层成为切削工具的理想材料。

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Impact of carbon content on the phase structure and mechanical properties of TiBCN coatings via direct current magnetron sputtering

In this study, unbalanced direct current magnetron sputtering was employed to develop TiBCN coatings on Si (100) wafers. The carbon (C) concentration was varied to manipulate the phase structure and mechanical properties of the coatings. The coatings were analyzed using Raman spectroscopy, scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and nanoindentation. The results revealed that the TiBCN-2 coating, with a C concentration of 4.4 at.%, exhibited optimal hardness and elastic modulus values of 33 and 291 GPa, respectively. On the other hand, as the C content increased from 4.4 to 24.4 at.%, the hardness and elastic modulus values of the coatings decreased to 21 and 225 GPa, respectively, due to the formation of boron nitride and carbon phases within the coating matrix. Therefore, the inclusion of an ideal C concentration can considerably improve the properties of TiBCN coatings, thus rendering the coating a desirable material for cutting tools.

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来源期刊

Reviews on Advanced Materials Science 工程技术-材料科学：综合

CiteScore

5.10

自引率

11.10%

发文量

审稿时长

3.5 months

期刊介绍： Reviews on Advanced Materials Science is a fully peer-reviewed, open access, electronic journal that publishes significant, original and relevant works in the area of theoretical and experimental studies of advanced materials. The journal provides the readers with free, instant, and permanent access to all content worldwide; and the authors with extensive promotion of published articles, long-time preservation, language-correction services, no space constraints and immediate publication. Reviews on Advanced Materials Science is listed inter alia by Clarivate Analytics (formerly Thomson Reuters) - Current Contents/Physical, Chemical, and Earth Sciences (CC/PC&ES), JCR and SCIE. Our standard policy requires each paper to be reviewed by at least two Referees and the peer-review process is single-blind.