突破图案设计的界限：与塔蒂亚娜-科瓦列维奇的对话

{"title":"突破图案设计的界限：与塔蒂亚娜-科瓦列维奇的对话","authors":"Harry Levinson","doi":"10.1117/1.jmm.23.2.020701","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":505970,"journal":{"name":"Journal of Micro/Nanopatterning, Materials, and Metrology","volume":"9 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Pushing the boundaries of patterning: a conversation with Tatiana Kovalevich\",\"authors\":\"Harry Levinson\",\"doi\":\"10.1117/1.jmm.23.2.020701\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":505970,\"journal\":{\"name\":\"Journal of Micro/Nanopatterning, Materials, and Metrology\",\"volume\":\"9 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-04-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Micro/Nanopatterning, Materials, and Metrology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/1.jmm.23.2.020701\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Micro/Nanopatterning, Materials, and Metrology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/1.jmm.23.2.020701","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}