形成轴向最大值亚波长直径的贝塞尔光束，用于半导体材料的诊断和非线性光刻技术

{"title":"形成轴向最大值亚波长直径的贝塞尔光束，用于半导体材料的诊断和非线性光刻技术","authors":"V. Belyi, S. Kurilkina, N. Khilo, P. Ropot","doi":"10.1364/jot.90.000639","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":16597,"journal":{"name":"Journal of Optical Technology","volume":null,"pages":null},"PeriodicalIF":0.5000,"publicationDate":"2024-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Formation of Bessel light beams with a subwavelength diameter of the axial maximum for diagnostics and nonlinear photolithography of semiconductor materials\",\"authors\":\"V. Belyi, S. Kurilkina, N. Khilo, P. Ropot\",\"doi\":\"10.1364/jot.90.000639\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":16597,\"journal\":{\"name\":\"Journal of Optical Technology\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.5000,\"publicationDate\":\"2024-04-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Optical Technology\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1364/jot.90.000639\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Optical Technology","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1364/jot.90.000639","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"OPTICS","Score":null,"Total":0}