精密玻璃成型过程中双面微透镜阵列的对准误差建模与控制

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION
Zihao Zeng, Tianfeng Zhou, Qian Yu, Jia Zhou, Gang Wang, Qiuchen Xie, Zifan Wang, Xiaoqiang Yao, Yubing Guo
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引用次数: 0

摘要

双面微透镜阵列(DSMLAs)包括两个单面 MLA 的组合,与其他类型的透镜相比,可以克服定位误差并大大提高透光率。精密玻璃成型 (PGM) 用于制造 DSMLAs,但在此过程中控制对准误差具有挑战性。本文采用新颖的材料组合制造模具组件,利用各种材料的非线性热膨胀特性来提高 DSMLA 的对准精度,从而在 PGM 过程中提高模芯的对准精度。通过建立 DSMLA 对中误差数学模型和模具-套筒对的热膨胀模型,确定了 DSMLA 最大对中误差与模具-套筒间隙之间的关系。这项研究提供了优化模套间隙和最小化 DSMLA 对中误差的方法。测得的 DSMLA 对准误差为 10.56 μm,与预测的最大对准误差相近。光学测量结果表明,均匀光束光斑的均匀度为 97.81%,有效均匀面积占总面积的 91.66%。所提出的方法为提高 DSMLAs 的性能提供了一种新策略。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Alignment error modeling and control of a double-sided microlens array during precision glass molding

Double-sided microlens arrays (DSMLAs) include combinations of two single-sided MLAs to overcome positioning errors and greatly improve light transmissivity compared to other types of lenses. Precision glass molding (PGM) is used to fabricate DSMLAs, but controlling alignment errors during this process is challenging. In this paper, a mold assembly was manufactured with a novel combination of materials to improve the alignment accuracy of mold cores during PGM by using the nonlinear thermal expansion characteristics of the various materials to improve the DSMLA alignment accuracy. By establishing a mathematical model of the DSMLA alignment error and a thermal expansion model of the mold-sleeve pair, the relationship between the maximum alignment error of the DSMLA and the mold-sleeve gap was determined. This research provides a method to optimize the mold-sleeve gap and minimize the alignment error of the DSMLA. The measured DSMLA alignment error was 10.56 μm, which is similar to the predicted maximum alignment error. Optical measurements showed that the uniformity of the homogenized beam spot was 97.81%, and the effective homogeneous area accounted for 91.66% of the total area. This proposed method provides a novel strategy to improve the performance of DSMLAs.

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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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