用于大规模微加工的光子整形工具

{"title":"用于大规模微加工的光子整形工具","authors":"Dion C. Mathews, Jikai Wang, M. Kaiser, M. Kumkar, J. Hellstern, J. Kleiner, Daniel Flamm","doi":"10.1117/12.3002862","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517849,"journal":{"name":"Laser-based Micro- and Nanoprocessing XVIII","volume":"12 3","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Photonic shaping tools for large-scale micro-machining\",\"authors\":\"Dion C. Mathews, Jikai Wang, M. Kaiser, M. Kumkar, J. Hellstern, J. Kleiner, Daniel Flamm\",\"doi\":\"10.1117/12.3002862\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":517849,\"journal\":{\"name\":\"Laser-based Micro- and Nanoprocessing XVIII\",\"volume\":\"12 3\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-03-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Laser-based Micro- and Nanoprocessing XVIII\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.3002862\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser-based Micro- and Nanoprocessing XVIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3002862","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}