用于微电子元件和量子计算应用的透明材料选择性激光诱导蚀刻 (SLE)

{"title":"用于微电子元件和量子计算应用的透明材料选择性激光诱导蚀刻 (SLE)","authors":"Christian Peters, Martin Kratz, Jana Köller, Sandra Borzek, Sebastian Simeth","doi":"10.1117/12.2692475","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517849,"journal":{"name":"Laser-based Micro- and Nanoprocessing XVIII","volume":"31 S106","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Selective laser-induced etching (SLE) of transparent materials for microelectronic components and quantum computing applications\",\"authors\":\"Christian Peters, Martin Kratz, Jana Köller, Sandra Borzek, Sebastian Simeth\",\"doi\":\"10.1117/12.2692475\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":517849,\"journal\":{\"name\":\"Laser-based Micro- and Nanoprocessing XVIII\",\"volume\":\"31 S106\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-03-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Laser-based Micro- and Nanoprocessing XVIII\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2692475\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser-based Micro- and Nanoprocessing XVIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2692475","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}