{"title":"碘等离子体在空心阴极条件下对钼的侵蚀","authors":"James D. Rogers, R. Branam","doi":"10.1116/6.0003367","DOIUrl":null,"url":null,"abstract":"In this study, the authors investigate the erosive effects of iodine plasma on molybdenum. By exposing molybdenum samples to three different test cases of iodine vapor, iodine plasma, and argon plasma, the plasma enhancement of erosion was characterized. A roughly exponential behavior with respect to temperature was found in iodine plasma at hollow cathode conditions and erosion rates as high as 70.1 ± 7.7 μm/h. Despite an oxygen content of <1%, evidence of oxidation was found in all test cases. Behavior consistent with preferential oxidation based on grain orientation was found in the iodine test cases.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"9 11","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Molybdenum erosion in iodine plasma at hollow cathode conditions\",\"authors\":\"James D. Rogers, R. Branam\",\"doi\":\"10.1116/6.0003367\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study, the authors investigate the erosive effects of iodine plasma on molybdenum. By exposing molybdenum samples to three different test cases of iodine vapor, iodine plasma, and argon plasma, the plasma enhancement of erosion was characterized. A roughly exponential behavior with respect to temperature was found in iodine plasma at hollow cathode conditions and erosion rates as high as 70.1 ± 7.7 μm/h. Despite an oxygen content of <1%, evidence of oxidation was found in all test cases. Behavior consistent with preferential oxidation based on grain orientation was found in the iodine test cases.\",\"PeriodicalId\":509398,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology A\",\"volume\":\"9 11\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-02-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology A\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0003367\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology A","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0003367","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Molybdenum erosion in iodine plasma at hollow cathode conditions
In this study, the authors investigate the erosive effects of iodine plasma on molybdenum. By exposing molybdenum samples to three different test cases of iodine vapor, iodine plasma, and argon plasma, the plasma enhancement of erosion was characterized. A roughly exponential behavior with respect to temperature was found in iodine plasma at hollow cathode conditions and erosion rates as high as 70.1 ± 7.7 μm/h. Despite an oxygen content of <1%, evidence of oxidation was found in all test cases. Behavior consistent with preferential oxidation based on grain orientation was found in the iodine test cases.