基于 a-plane ( 11 2 ¯ 0 ) Al0.56Sc0.44N 薄膜的高机电耦合声表面波谐振器的理论与实验研究

IF 2.5 4区物理与天体物理 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

Physica Status Solidi-Rapid Research Letters Pub Date : 2024-02-21 DOI:10.1002/pssr.202300443

Weilun Xie, Weipeng Xuan, Danyang Fu, Yingqi Jiang, Qikun Wang, Xingli He, Liang Wu, Jinkai Chen, Shurong Dong, Hao Jin, Jikui Luo

{"title":"基于 a-plane ( 11 2 ¯ 0 ) Al0.56Sc0.44N 薄膜的高机电耦合声表面波谐振器的理论与实验研究","authors":"Weilun Xie, Weipeng Xuan, Danyang Fu, Yingqi Jiang, Qikun Wang, Xingli He, Liang Wu, Jinkai Chen, Shurong Dong, Hao Jin, Jikui Luo","doi":"10.1002/pssr.202300443","DOIUrl":null,"url":null,"abstract":"In this work, a high-quality Al0.56Sc0.44N<mjx-container aria-label=\"left parenthesis 11 ModifyingAbove 2 With bar 0 right parenthesis\" ctxtmenu_counter=\"1\" ctxtmenu_oldtabindex=\"1\" jax=\"CHTML\" role=\"application\" sre-explorer- style=\"font-size: 103%; position: relative;\" tabindex=\"0\"><mjx-math aria-hidden=\"true\"><mjx-semantics><mjx-mrow><mjx-mrow data-semantic-children=\"8\" data-semantic-content=\"0,9\" data-semantic- data-semantic-role=\"leftright\" data-semantic-speech=\"left parenthesis 11 ModifyingAbove 2 With bar 0 right parenthesis\" data-semantic-type=\"fenced\"><mjx-mo data-semantic- data-semantic-operator=\"fenced\" data-semantic-parent=\"10\" data-semantic-role=\"open\" data-semantic-type=\"fence\" style=\"margin-left: 0.056em; margin-right: 0.056em;\"><mjx-c></mjx-c></mjx-mo><mjx-mrow data-semantic-annotation=\"clearspeak:unit\" data-semantic-children=\"1,4,5\" data-semantic-content=\"6,7\" data-semantic- data-semantic-parent=\"10\" data-semantic-role=\"implicit\" data-semantic-type=\"infixop\"><mjx-mn data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic- data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"number\"><mjx-c></mjx-c><mjx-c></mjx-c></mjx-mn><mjx-mo data-semantic-added=\"true\" data-semantic- data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"8\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\" style=\"margin-left: 0.056em; margin-right: 0.056em;\"><mjx-c></mjx-c></mjx-mo><mjx-mover data-semantic-children=\"2,3\" data-semantic- data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"overscore\"><mjx-over style=\"padding-bottom: 0.105em; padding-left: 0.25em; margin-bottom: -0.544em;\"><mjx-mo data-semantic- data-semantic-parent=\"4\" data-semantic-role=\"overaccent\" data-semantic-type=\"operator\" style=\"width: 0px; margin-left: -0.25em;\"><mjx-c></mjx-c></mjx-mo></mjx-over><mjx-base><mjx-mn data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic- data-semantic-parent=\"4\" data-semantic-role=\"integer\" data-semantic-type=\"number\"><mjx-c></mjx-c></mjx-mn></mjx-base></mjx-mover><mjx-mo data-semantic-added=\"true\" data-semantic- data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"8\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\" style=\"margin-left: 0.056em; margin-right: 0.056em;\"><mjx-c></mjx-c></mjx-mo><mjx-mn data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic- data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"number\"><mjx-c></mjx-c></mjx-mn></mjx-mrow><mjx-mo data-semantic- data-semantic-operator=\"fenced\" data-semantic-parent=\"10\" data-semantic-role=\"close\" data-semantic-type=\"fence\" style=\"margin-left: 0.056em; margin-right: 0.056em;\"><mjx-c></mjx-c></mjx-mo></mjx-mrow></mjx-mrow></mjx-semantics></mjx-math><mjx-assistive-mml aria-hidden=\"true\" display=\"inline\" unselectable=\"on\"><math altimg=\"/cms/asset/b3afac2c-d86c-4a82-8e01-950afeedddd7/pssr202300443-math-0002.png\" xmlns=\"http://www.w3.org/1998/Math/MathML\"><semantics><mrow><mrow data-semantic-=\"\" data-semantic-children=\"8\" data-semantic-content=\"0,9\" data-semantic-role=\"leftright\" data-semantic-speech=\"left parenthesis 11 ModifyingAbove 2 With bar 0 right parenthesis\" data-semantic-type=\"fenced\"><mo data-semantic-=\"\" data-semantic-operator=\"fenced\" data-semantic-parent=\"10\" data-semantic-role=\"open\" data-semantic-type=\"fence\" stretchy=\"false\">(</mo><mrow data-semantic-=\"\" data-semantic-annotation=\"clearspeak:unit\" data-semantic-children=\"1,4,5\" data-semantic-content=\"6,7\" data-semantic-parent=\"10\" data-semantic-role=\"implicit\" data-semantic-type=\"infixop\"><mn data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"number\">11</mn><mo data-semantic-=\"\" data-semantic-added=\"true\" data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"8\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\">⁢</mo><mover accent=\"true\" data-semantic-=\"\" data-semantic-children=\"2,3\" data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"overscore\"><mn data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic-parent=\"4\" data-semantic-role=\"integer\" data-semantic-type=\"number\">2</mn><mo data-semantic-=\"\" data-semantic-parent=\"4\" data-semantic-role=\"overaccent\" data-semantic-type=\"operator\" stretchy=\"false\">¯</mo></mover><mo data-semantic-=\"\" data-semantic-added=\"true\" data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"8\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\">⁢</mo><mn data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"number\">0</mn></mrow><mo data-semantic-=\"\" data-semantic-operator=\"fenced\" data-semantic-parent=\"10\" data-semantic-role=\"close\" data-semantic-type=\"fence\" stretchy=\"false\">)</mo></mrow></mrow>$\\left(\\right. 11 \\bar{2} 0 \\left.\\right)$</annotation></semantics></math></mjx-assistive-mml></mjx-container> piezoelectric thin film-based surface acoustic wave (SAW) resonator was developed. The Al0.56Sc0.44N was deposited on a r-plane Al2O3 <mjx-container aria-label=\"left parenthesis 1 ModifyingAbove 1 With bar 02 right parenthesis\" ctxtmenu_counter=\"2\" ctxtmenu_oldtabindex=\"1\" jax=\"CHTML\" role=\"application\" sre-explorer- style=\"font-size: 103%; position: relative;\" tabindex=\"0\"><mjx-math aria-hidden=\"true\"><mjx-semantics><mjx-mrow><mjx-mrow data-semantic-children=\"8\" data-semantic-content=\"0,9\" data-semantic- data-semantic-role=\"leftright\" data-semantic-speech=\"left parenthesis 1 ModifyingAbove 1 With bar 02 right parenthesis\" data-semantic-type=\"fenced\"><mjx-mo data-semantic- data-semantic-operator=\"fenced\" data-semantic-parent=\"10\" data-semantic-role=\"open\" data-semantic-type=\"fence\" style=\"margin-left: 0.056em; margin-right: 0.056em;\"><mjx-c></mjx-c></mjx-mo><mjx-mrow data-semantic-annotation=\"clearspeak:unit\" data-semantic-children=\"1,4,5\" data-semantic-content=\"6,7\" data-semantic- data-semantic-parent=\"10\" data-semantic-role=\"implicit\" data-semantic-type=\"infixop\"><mjx-mn data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic- data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"number\"><mjx-c></mjx-c></mjx-mn><mjx-mo data-semantic-added=\"true\" data-semantic- data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"8\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\" style=\"margin-left: 0.056em; margin-right: 0.056em;\"><mjx-c></mjx-c></mjx-mo><mjx-mover data-semantic-children=\"2,3\" data-semantic- data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"overscore\"><mjx-over style=\"padding-bottom: 0.105em; padding-left: 0.25em; margin-bottom: -0.544em;\"><mjx-mo data-semantic- data-semantic-parent=\"4\" data-semantic-role=\"overaccent\" data-semantic-type=\"operator\" style=\"width: 0px; margin-left: -0.25em;\"><mjx-c></mjx-c></mjx-mo></mjx-over><mjx-base><mjx-mn data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic- data-semantic-parent=\"4\" data-semantic-role=\"integer\" data-semantic-type=\"number\"><mjx-c></mjx-c></mjx-mn></mjx-base></mjx-mover><mjx-mo data-semantic-added=\"true\" data-semantic- data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"8\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\" style=\"margin-left: 0.056em; margin-right: 0.056em;\"><mjx-c></mjx-c></mjx-mo><mjx-mn data-semantic-annotation=\"general:basenumber;clearspeak:simple\" data-semantic-font=\"normal\" data-semantic- data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"number\"><mjx-c></mjx-c><mjx-c></mjx-c></mjx-mn></mjx-mrow><mjx-mo data-semantic- data-semantic-operator=\"fenced\" data-semantic-parent=\"10\" data-semantic-role=\"close\" data-semantic-type=\"fence\" style=\"margin-left: 0.056em; margin-right: 0.056em;\"><mjx-c></mjx-c></mjx-mo></mjx-mrow></mjx-mrow></mjx-semantics></mjx-math><mjx-assistive-mml aria-hidden=\"true\" display=\"inline\" unselectable=\"on\"><math altimg=\"/cms/asset/06cd5669-e0c3-4afc-ae45-67afaba2a904/pssr202300443-math-0003.png\" xmlns=\"http://www.w3.org/1998/Math/MathML\"><semantics><mrow><mrow data-semantic-=\"\" data-semantic-children=\"8\" data-semantic-content=\"0,9\" data-semantic-role=\"leftright\" data-semantic-speech=\"left parenthesis 1 ModifyingAbove 1 With bar 02 right parenthesis\" data-semantic-type=\"fenced\"><mo data-semantic-=\"\" data-semantic-operator=\"fenced\" data-semantic-parent=\"10\" data-semantic-role=\"open\" data-semantic-type=\"fence\" stretchy=\"false\">(</mo><mrow data-semantic-=\"\" data-semantic-annotation=\"clearspeak:unit\" data-semantic-children=\"1,4,5\" data-semantic-content=\"6,7\" data-semantic-parent=\"10\" data-semantic-role=\"implicit\" data-semantic-type=\"infixop\"><mn data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"number\">1</mn><mo data-semantic-=\"\" data-semantic-added=\"true\" data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"8\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\">⁢</mo><mover accent=\"true\" data-semantic-=\"\" data-semantic-children=\"2,3\" data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"overscore\"><mn data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic-parent=\"4\" data-semantic-role=\"integer\" data-semantic-type=\"number\">1</mn><mo data-semantic-=\"\" data-semantic-parent=\"4\" data-semantic-role=\"overaccent\" data-semantic-type=\"operator\" stretchy=\"false\">¯</mo></mover><mo data-semantic-=\"\" data-semantic-added=\"true\" data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"8\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\">⁢</mo><mn data-semantic-=\"\" data-semantic-annotation=\"general:basenumber;clearspeak:simple\" data-semantic-font=\"normal\" data-semantic-parent=\"8\" data-semantic-role=\"integer\" data-semantic-type=\"number\">02</mn></mrow><mo data-semantic-=\"\" data-semantic-operator=\"fenced\" data-semantic-parent=\"10\" data-semantic-role=\"close\" data-semantic-type=\"fence\" stretchy=\"false\">)</mo></mrow></mrow>$\\left(\\right. 1 \\bar{1} 02 \\left.\\right)$</annotation></semantics></math></mjx-assistive-mml></mjx-container> substrate by reactive magnetron sputtering. X-ray diffraction (XRD) spectroscopy showed that the grown Al0.56Sc0.44N films are single-phased and a-plane oriented. The FWHM of the XRD rocking curve is only 0.4°, which is smaller than most of the reported values. The effects of normalized thickness of the piezoelectric layer, electrode materials and thickness on acoustic properties of the SAW resonators were investigated through the 3D finite element method equipped with the hierarchical cascading technique. A monotonically decreasing resonant frequency can be obtained with the mass loading of both the electrode metals. For the devices with a Pt electrode, it is observed that the electromechanical coupling coefficient (<mjx-container aria-label=\"k Subscript e f f Superscript 2\" ctxtmenu_counter=\"3\" ctxtmenu_oldtabindex=\"1\" jax=\"CHTML\" role=\"application\" sre-explorer- style=\"font-size: 103%; position: relative;\" tabindex=\"0\"><mjx-math aria-hidden=\"true\"><mjx-semantics><mjx-mrow><mjx-msubsup data-semantic-children=\"0,6,7\" data-semantic-collapsed=\"(9 (8 0 6) 7)\" data-semantic- data-semantic-role=\"latinletter\" data-semantic-speech=\"k Subscript e f f Superscript 2\" data-semantic-type=\"subsup\"><mjx-mi data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic- data-semantic-parent=\"9\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\"><mjx-c></mjx-c></mjx-mi><mjx-script style=\"vertical-align: -0.316em; margin-left: 0px;\"><mjx-mn data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic- data-semantic-parent=\"9\" data-semantic-role=\"integer\" data-semantic-type=\"number\" size=\"s\"><mjx-c></mjx-c></mjx-mn><mjx-spacer style=\"margin-top: 0.18em;\"></mjx-spacer><mjx-mrow data-semantic-annotation=\"clearspeak:unit\" data-semantic-children=\"1,2,3\" data-semantic-content=\"4,5\" data-semantic- data-semantic-parent=\"9\" data-semantic-role=\"implicit\" data-semantic-type=\"infixop\" size=\"s\"><mjx-mi data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic- data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\"><mjx-c></mjx-c></mjx-mi><mjx-mo data-semantic-added=\"true\" data-semantic- data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"6\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\"><mjx-c></mjx-c></mjx-mo><mjx-mi data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic- data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\"><mjx-c></mjx-c></mjx-mi><mjx-mo data-semantic-added=\"true\" data-semantic- data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"6\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\"><mjx-c></mjx-c></mjx-mo><mjx-mi data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic- data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\"><mjx-c></mjx-c></mjx-mi></mjx-mrow></mjx-script></mjx-msubsup></mjx-mrow></mjx-semantics></mjx-math><mjx-assistive-mml aria-hidden=\"true\" display=\"inline\" unselectable=\"on\"><math altimg=\"/cms/asset/d675e832-4e47-4419-b9e6-935de917d37b/pssr202300443-math-0004.png\" xmlns=\"http://www.w3.org/1998/Math/MathML\"><semantics><mrow><msubsup data-semantic-=\"\" data-semantic-children=\"0,6,7\" data-semantic-collapsed=\"(9 (8 0 6) 7)\" data-semantic-role=\"latinletter\" data-semantic-speech=\"k Subscript e f f Superscript 2\" data-semantic-type=\"subsup\"><mi data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic-parent=\"9\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\">k</mi><mrow data-semantic-=\"\" data-semantic-annotation=\"clearspeak:unit\" data-semantic-children=\"1,2,3\" data-semantic-content=\"4,5\" data-semantic-parent=\"9\" data-semantic-role=\"implicit\" data-semantic-type=\"infixop\"><mi data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\">e</mi><mo data-semantic-=\"\" data-semantic-added=\"true\" data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"6\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\">⁢</mo><mi data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\">f</mi><mo data-semantic-=\"\" data-semantic-added=\"true\" data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"6\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\">⁢</mo><mi data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\">f</mi></mrow><mn data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic-parent=\"9\" data-semantic-role=\"integer\" data-semantic-type=\"number\">2</mn></msubsup></mrow>$k_{e f f}^{2}$</annotation></semantics></math></mjx-assistive-mml></mjx-container>) exhibits a nonlinear characteristic of first increasing and then decreasing with the increase of electrode thickness. SAW resonators with a nonpolar a-plane Al0.56Sc0.44N thin films were fabricated, showing an exceptionally high <mjx-container aria-label=\"k Subscript e f f Superscript 2\" ctxtmenu_counter=\"4\" ctxtmenu_oldtabindex=\"1\" jax=\"CHTML\" role=\"application\" sre-explorer- style=\"font-size: 103%; position: relative;\" tabindex=\"0\"><mjx-math aria-hidden=\"true\"><mjx-semantics><mjx-mrow><mjx-msubsup data-semantic-children=\"0,6,7\" data-semantic-collapsed=\"(9 (8 0 6) 7)\" data-semantic- data-semantic-role=\"latinletter\" data-semantic-speech=\"k Subscript e f f Superscript 2\" data-semantic-type=\"subsup\"><mjx-mi data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic- data-semantic-parent=\"9\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\"><mjx-c></mjx-c></mjx-mi><mjx-script style=\"vertical-align: -0.316em; margin-left: 0px;\"><mjx-mn data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic- data-semantic-parent=\"9\" data-semantic-role=\"integer\" data-semantic-type=\"number\" size=\"s\"><mjx-c></mjx-c></mjx-mn><mjx-spacer style=\"margin-top: 0.18em;\"></mjx-spacer><mjx-mrow data-semantic-annotation=\"clearspeak:unit\" data-semantic-children=\"1,2,3\" data-semantic-content=\"4,5\" data-semantic- data-semantic-parent=\"9\" data-semantic-role=\"implicit\" data-semantic-type=\"infixop\" size=\"s\"><mjx-mi data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic- data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\"><mjx-c></mjx-c></mjx-mi><mjx-mo data-semantic-added=\"true\" data-semantic- data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"6\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\"><mjx-c></mjx-c></mjx-mo><mjx-mi data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic- data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\"><mjx-c></mjx-c></mjx-mi><mjx-mo data-semantic-added=\"true\" data-semantic- data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"6\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\"><mjx-c></mjx-c></mjx-mo><mjx-mi data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic- data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\"><mjx-c></mjx-c></mjx-mi></mjx-mrow></mjx-script></mjx-msubsup></mjx-mrow></mjx-semantics></mjx-math><mjx-assistive-mml aria-hidden=\"true\" display=\"inline\" unselectable=\"on\"><math altimg=\"/cms/asset/1e1ee0fc-558d-4380-bd04-b8e48ebea95b/pssr202300443-math-0005.png\" xmlns=\"http://www.w3.org/1998/Math/MathML\"><semantics><mrow><msubsup data-semantic-=\"\" data-semantic-children=\"0,6,7\" data-semantic-collapsed=\"(9 (8 0 6) 7)\" data-semantic-role=\"latinletter\" data-semantic-speech=\"k Subscript e f f Superscript 2\" data-semantic-type=\"subsup\"><mi data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic-parent=\"9\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\">k</mi><mrow data-semantic-=\"\" data-semantic-annotation=\"clearspeak:unit\" data-semantic-children=\"1,2,3\" data-semantic-content=\"4,5\" data-semantic-parent=\"9\" data-semantic-role=\"implicit\" data-semantic-type=\"infixop\"><mi data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\">e</mi><mo data-semantic-=\"\" data-semantic-added=\"true\" data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"6\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\">⁢</mo><mi data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\">f</mi><mo data-semantic-=\"\" data-semantic-added=\"true\" data-semantic-operator=\"infixop,⁢\" data-semantic-parent=\"6\" data-semantic-role=\"multiplication\" data-semantic-type=\"operator\">⁢</mo><mi data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"italic\" data-semantic-parent=\"6\" data-semantic-role=\"latinletter\" data-semantic-type=\"identifier\">f</mi></mrow><mn data-semantic-=\"\" data-semantic-annotation=\"clearspeak:simple\" data-semantic-font=\"normal\" data-semantic-parent=\"9\" data-semantic-role=\"integer\" data-semantic-type=\"number\">2</mn></msubsup></mrow>$k_{e f f}^{2}$</annotation></semantics></math></mjx-assistive-mml></mjx-container> of 4.6%. This result demonstrates a significant potential of AlScN films with the a-plane orientation in RF application.","PeriodicalId":54619,"journal":{"name":"Physica Status Solidi-Rapid Research Letters","volume":null,"pages":null},"PeriodicalIF":2.5000,"publicationDate":"2024-02-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Theoretical and experimental study of high electromechanical coupling SAW resonators based on a-plane ( 11 2 ¯ 0 ) Al0.56Sc0.44N films\",\"authors\":\"Weilun Xie, Weipeng Xuan, Danyang Fu, Yingqi Jiang, Qikun Wang, Xingli He, Liang Wu, Jinkai Chen, Shurong Dong, Hao Jin, Jikui Luo\",\"doi\":\"10.1002/pssr.202300443\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, a high-quality Al0.56Sc0.44N<mjx-container aria-label=\\\"left parenthesis 11 ModifyingAbove 2 With bar 0 right parenthesis\\\" ctxtmenu_counter=\\\"1\\\" ctxtmenu_oldtabindex=\\\"1\\\" jax=\\\"CHTML\\\" role=\\\"application\\\" sre-explorer- style=\\\"font-size: 103%; position: relative;\\\" tabindex=\\\"0\\\"><mjx-math aria-hidden=\\\"true\\\"><mjx-semantics><mjx-mrow><mjx-mrow data-semantic-children=\\\"8\\\" data-semantic-content=\\\"0,9\\\" data-semantic- data-semantic-role=\\\"leftright\\\" data-semantic-speech=\\\"left parenthesis 11 ModifyingAbove 2 With bar 0 right parenthesis\\\" data-semantic-type=\\\"fenced\\\"><mjx-mo data-semantic- data-semantic-operator=\\\"fenced\\\" data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"open\\\" data-semantic-type=\\\"fence\\\" style=\\\"margin-left: 0.056em; margin-right: 0.056em;\\\"><mjx-c></mjx-c></mjx-mo><mjx-mrow data-semantic-annotation=\\\"clearspeak:unit\\\" data-semantic-children=\\\"1,4,5\\\" data-semantic-content=\\\"6,7\\\" data-semantic- data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"implicit\\\" data-semantic-type=\\\"infixop\\\"><mjx-mn data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic- data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\"><mjx-c></mjx-c><mjx-c></mjx-c></mjx-mn><mjx-mo data-semantic-added=\\\"true\\\" data-semantic- data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\" style=\\\"margin-left: 0.056em; margin-right: 0.056em;\\\"><mjx-c></mjx-c></mjx-mo><mjx-mover data-semantic-children=\\\"2,3\\\" data-semantic- data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"overscore\\\"><mjx-over style=\\\"padding-bottom: 0.105em; padding-left: 0.25em; margin-bottom: -0.544em;\\\"><mjx-mo data-semantic- data-semantic-parent=\\\"4\\\" data-semantic-role=\\\"overaccent\\\" data-semantic-type=\\\"operator\\\" style=\\\"width: 0px; margin-left: -0.25em;\\\"><mjx-c></mjx-c></mjx-mo></mjx-over><mjx-base><mjx-mn data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic- data-semantic-parent=\\\"4\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\"><mjx-c></mjx-c></mjx-mn></mjx-base></mjx-mover><mjx-mo data-semantic-added=\\\"true\\\" data-semantic- data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\" style=\\\"margin-left: 0.056em; margin-right: 0.056em;\\\"><mjx-c></mjx-c></mjx-mo><mjx-mn data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic- data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\"><mjx-c></mjx-c></mjx-mn></mjx-mrow><mjx-mo data-semantic- data-semantic-operator=\\\"fenced\\\" data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"close\\\" data-semantic-type=\\\"fence\\\" style=\\\"margin-left: 0.056em; margin-right: 0.056em;\\\"><mjx-c></mjx-c></mjx-mo></mjx-mrow></mjx-mrow></mjx-semantics></mjx-math><mjx-assistive-mml aria-hidden=\\\"true\\\" display=\\\"inline\\\" unselectable=\\\"on\\\"><math altimg=\\\"/cms/asset/b3afac2c-d86c-4a82-8e01-950afeedddd7/pssr202300443-math-0002.png\\\" xmlns=\\\"http://www.w3.org/1998/Math/MathML\\\"><semantics><mrow><mrow data-semantic-=\\\"\\\" data-semantic-children=\\\"8\\\" data-semantic-content=\\\"0,9\\\" data-semantic-role=\\\"leftright\\\" data-semantic-speech=\\\"left parenthesis 11 ModifyingAbove 2 With bar 0 right parenthesis\\\" data-semantic-type=\\\"fenced\\\"><mo data-semantic-=\\\"\\\" data-semantic-operator=\\\"fenced\\\" data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"open\\\" data-semantic-type=\\\"fence\\\" stretchy=\\\"false\\\">(</mo><mrow data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:unit\\\" data-semantic-children=\\\"1,4,5\\\" data-semantic-content=\\\"6,7\\\" data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"implicit\\\" data-semantic-type=\\\"infixop\\\"><mn data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\">11</mn><mo data-semantic-=\\\"\\\" data-semantic-added=\\\"true\\\" data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\">⁢</mo><mover accent=\\\"true\\\" data-semantic-=\\\"\\\" data-semantic-children=\\\"2,3\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"overscore\\\"><mn data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic-parent=\\\"4\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\">2</mn><mo data-semantic-=\\\"\\\" data-semantic-parent=\\\"4\\\" data-semantic-role=\\\"overaccent\\\" data-semantic-type=\\\"operator\\\" stretchy=\\\"false\\\">¯</mo></mover><mo data-semantic-=\\\"\\\" data-semantic-added=\\\"true\\\" data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\">⁢</mo><mn data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\">0</mn></mrow><mo data-semantic-=\\\"\\\" data-semantic-operator=\\\"fenced\\\" data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"close\\\" data-semantic-type=\\\"fence\\\" stretchy=\\\"false\\\">)</mo></mrow></mrow>$\\\\left(\\\\right. 11 \\\\bar{2} 0 \\\\left.\\\\right)$</annotation></semantics></math></mjx-assistive-mml></mjx-container> piezoelectric thin film-based surface acoustic wave (SAW) resonator was developed. The Al0.56Sc0.44N was deposited on a r-plane Al2O3 <mjx-container aria-label=\\\"left parenthesis 1 ModifyingAbove 1 With bar 02 right parenthesis\\\" ctxtmenu_counter=\\\"2\\\" ctxtmenu_oldtabindex=\\\"1\\\" jax=\\\"CHTML\\\" role=\\\"application\\\" sre-explorer- style=\\\"font-size: 103%; position: relative;\\\" tabindex=\\\"0\\\"><mjx-math aria-hidden=\\\"true\\\"><mjx-semantics><mjx-mrow><mjx-mrow data-semantic-children=\\\"8\\\" data-semantic-content=\\\"0,9\\\" data-semantic- data-semantic-role=\\\"leftright\\\" data-semantic-speech=\\\"left parenthesis 1 ModifyingAbove 1 With bar 02 right parenthesis\\\" data-semantic-type=\\\"fenced\\\"><mjx-mo data-semantic- data-semantic-operator=\\\"fenced\\\" data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"open\\\" data-semantic-type=\\\"fence\\\" style=\\\"margin-left: 0.056em; margin-right: 0.056em;\\\"><mjx-c></mjx-c></mjx-mo><mjx-mrow data-semantic-annotation=\\\"clearspeak:unit\\\" data-semantic-children=\\\"1,4,5\\\" data-semantic-content=\\\"6,7\\\" data-semantic- data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"implicit\\\" data-semantic-type=\\\"infixop\\\"><mjx-mn data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic- data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\"><mjx-c></mjx-c></mjx-mn><mjx-mo data-semantic-added=\\\"true\\\" data-semantic- data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\" style=\\\"margin-left: 0.056em; margin-right: 0.056em;\\\"><mjx-c></mjx-c></mjx-mo><mjx-mover data-semantic-children=\\\"2,3\\\" data-semantic- data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"overscore\\\"><mjx-over style=\\\"padding-bottom: 0.105em; padding-left: 0.25em; margin-bottom: -0.544em;\\\"><mjx-mo data-semantic- data-semantic-parent=\\\"4\\\" data-semantic-role=\\\"overaccent\\\" data-semantic-type=\\\"operator\\\" style=\\\"width: 0px; margin-left: -0.25em;\\\"><mjx-c></mjx-c></mjx-mo></mjx-over><mjx-base><mjx-mn data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic- data-semantic-parent=\\\"4\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\"><mjx-c></mjx-c></mjx-mn></mjx-base></mjx-mover><mjx-mo data-semantic-added=\\\"true\\\" data-semantic- data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\" style=\\\"margin-left: 0.056em; margin-right: 0.056em;\\\"><mjx-c></mjx-c></mjx-mo><mjx-mn data-semantic-annotation=\\\"general:basenumber;clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic- data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\"><mjx-c></mjx-c><mjx-c></mjx-c></mjx-mn></mjx-mrow><mjx-mo data-semantic- data-semantic-operator=\\\"fenced\\\" data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"close\\\" data-semantic-type=\\\"fence\\\" style=\\\"margin-left: 0.056em; margin-right: 0.056em;\\\"><mjx-c></mjx-c></mjx-mo></mjx-mrow></mjx-mrow></mjx-semantics></mjx-math><mjx-assistive-mml aria-hidden=\\\"true\\\" display=\\\"inline\\\" unselectable=\\\"on\\\"><math altimg=\\\"/cms/asset/06cd5669-e0c3-4afc-ae45-67afaba2a904/pssr202300443-math-0003.png\\\" xmlns=\\\"http://www.w3.org/1998/Math/MathML\\\"><semantics><mrow><mrow data-semantic-=\\\"\\\" data-semantic-children=\\\"8\\\" data-semantic-content=\\\"0,9\\\" data-semantic-role=\\\"leftright\\\" data-semantic-speech=\\\"left parenthesis 1 ModifyingAbove 1 With bar 02 right parenthesis\\\" data-semantic-type=\\\"fenced\\\"><mo data-semantic-=\\\"\\\" data-semantic-operator=\\\"fenced\\\" data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"open\\\" data-semantic-type=\\\"fence\\\" stretchy=\\\"false\\\">(</mo><mrow data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:unit\\\" data-semantic-children=\\\"1,4,5\\\" data-semantic-content=\\\"6,7\\\" data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"implicit\\\" data-semantic-type=\\\"infixop\\\"><mn data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\">1</mn><mo data-semantic-=\\\"\\\" data-semantic-added=\\\"true\\\" data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\">⁢</mo><mover accent=\\\"true\\\" data-semantic-=\\\"\\\" data-semantic-children=\\\"2,3\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"overscore\\\"><mn data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic-parent=\\\"4\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\">1</mn><mo data-semantic-=\\\"\\\" data-semantic-parent=\\\"4\\\" data-semantic-role=\\\"overaccent\\\" data-semantic-type=\\\"operator\\\" stretchy=\\\"false\\\">¯</mo></mover><mo data-semantic-=\\\"\\\" data-semantic-added=\\\"true\\\" data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\">⁢</mo><mn data-semantic-=\\\"\\\" data-semantic-annotation=\\\"general:basenumber;clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic-parent=\\\"8\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\">02</mn></mrow><mo data-semantic-=\\\"\\\" data-semantic-operator=\\\"fenced\\\" data-semantic-parent=\\\"10\\\" data-semantic-role=\\\"close\\\" data-semantic-type=\\\"fence\\\" stretchy=\\\"false\\\">)</mo></mrow></mrow>$\\\\left(\\\\right. 1 \\\\bar{1} 02 \\\\left.\\\\right)$</annotation></semantics></math></mjx-assistive-mml></mjx-container> substrate by reactive magnetron sputtering. X-ray diffraction (XRD) spectroscopy showed that the grown Al0.56Sc0.44N films are single-phased and a-plane oriented. The FWHM of the XRD rocking curve is only 0.4°, which is smaller than most of the reported values. The effects of normalized thickness of the piezoelectric layer, electrode materials and thickness on acoustic properties of the SAW resonators were investigated through the 3D finite element method equipped with the hierarchical cascading technique. A monotonically decreasing resonant frequency can be obtained with the mass loading of both the electrode metals. For the devices with a Pt electrode, it is observed that the electromechanical coupling coefficient (<mjx-container aria-label=\\\"k Subscript e f f Superscript 2\\\" ctxtmenu_counter=\\\"3\\\" ctxtmenu_oldtabindex=\\\"1\\\" jax=\\\"CHTML\\\" role=\\\"application\\\" sre-explorer- style=\\\"font-size: 103%; position: relative;\\\" tabindex=\\\"0\\\"><mjx-math aria-hidden=\\\"true\\\"><mjx-semantics><mjx-mrow><mjx-msubsup data-semantic-children=\\\"0,6,7\\\" data-semantic-collapsed=\\\"(9 (8 0 6) 7)\\\" data-semantic- data-semantic-role=\\\"latinletter\\\" data-semantic-speech=\\\"k Subscript e f f Superscript 2\\\" data-semantic-type=\\\"subsup\\\"><mjx-mi data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic- data-semantic-parent=\\\"9\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\"><mjx-c></mjx-c></mjx-mi><mjx-script style=\\\"vertical-align: -0.316em; margin-left: 0px;\\\"><mjx-mn data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic- data-semantic-parent=\\\"9\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\" size=\\\"s\\\"><mjx-c></mjx-c></mjx-mn><mjx-spacer style=\\\"margin-top: 0.18em;\\\"></mjx-spacer><mjx-mrow data-semantic-annotation=\\\"clearspeak:unit\\\" data-semantic-children=\\\"1,2,3\\\" data-semantic-content=\\\"4,5\\\" data-semantic- data-semantic-parent=\\\"9\\\" data-semantic-role=\\\"implicit\\\" data-semantic-type=\\\"infixop\\\" size=\\\"s\\\"><mjx-mi data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic- data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\"><mjx-c></mjx-c></mjx-mi><mjx-mo data-semantic-added=\\\"true\\\" data-semantic- data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\"><mjx-c></mjx-c></mjx-mo><mjx-mi data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic- data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\"><mjx-c></mjx-c></mjx-mi><mjx-mo data-semantic-added=\\\"true\\\" data-semantic- data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\"><mjx-c></mjx-c></mjx-mo><mjx-mi data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic- data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\"><mjx-c></mjx-c></mjx-mi></mjx-mrow></mjx-script></mjx-msubsup></mjx-mrow></mjx-semantics></mjx-math><mjx-assistive-mml aria-hidden=\\\"true\\\" display=\\\"inline\\\" unselectable=\\\"on\\\"><math altimg=\\\"/cms/asset/d675e832-4e47-4419-b9e6-935de917d37b/pssr202300443-math-0004.png\\\" xmlns=\\\"http://www.w3.org/1998/Math/MathML\\\"><semantics><mrow><msubsup data-semantic-=\\\"\\\" data-semantic-children=\\\"0,6,7\\\" data-semantic-collapsed=\\\"(9 (8 0 6) 7)\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-speech=\\\"k Subscript e f f Superscript 2\\\" data-semantic-type=\\\"subsup\\\"><mi data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic-parent=\\\"9\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\">k</mi><mrow data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:unit\\\" data-semantic-children=\\\"1,2,3\\\" data-semantic-content=\\\"4,5\\\" data-semantic-parent=\\\"9\\\" data-semantic-role=\\\"implicit\\\" data-semantic-type=\\\"infixop\\\"><mi data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\">e</mi><mo data-semantic-=\\\"\\\" data-semantic-added=\\\"true\\\" data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\">⁢</mo><mi data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\">f</mi><mo data-semantic-=\\\"\\\" data-semantic-added=\\\"true\\\" data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\">⁢</mo><mi data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\">f</mi></mrow><mn data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic-parent=\\\"9\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\">2</mn></msubsup></mrow>$k_{e f f}^{2}$</annotation></semantics></math></mjx-assistive-mml></mjx-container>) exhibits a nonlinear characteristic of first increasing and then decreasing with the increase of electrode thickness. SAW resonators with a nonpolar a-plane Al0.56Sc0.44N thin films were fabricated, showing an exceptionally high <mjx-container aria-label=\\\"k Subscript e f f Superscript 2\\\" ctxtmenu_counter=\\\"4\\\" ctxtmenu_oldtabindex=\\\"1\\\" jax=\\\"CHTML\\\" role=\\\"application\\\" sre-explorer- style=\\\"font-size: 103%; position: relative;\\\" tabindex=\\\"0\\\"><mjx-math aria-hidden=\\\"true\\\"><mjx-semantics><mjx-mrow><mjx-msubsup data-semantic-children=\\\"0,6,7\\\" data-semantic-collapsed=\\\"(9 (8 0 6) 7)\\\" data-semantic- data-semantic-role=\\\"latinletter\\\" data-semantic-speech=\\\"k Subscript e f f Superscript 2\\\" data-semantic-type=\\\"subsup\\\"><mjx-mi data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic- data-semantic-parent=\\\"9\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\"><mjx-c></mjx-c></mjx-mi><mjx-script style=\\\"vertical-align: -0.316em; margin-left: 0px;\\\"><mjx-mn 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altimg=\\\"/cms/asset/1e1ee0fc-558d-4380-bd04-b8e48ebea95b/pssr202300443-math-0005.png\\\" xmlns=\\\"http://www.w3.org/1998/Math/MathML\\\"><semantics><mrow><msubsup data-semantic-=\\\"\\\" data-semantic-children=\\\"0,6,7\\\" data-semantic-collapsed=\\\"(9 (8 0 6) 7)\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-speech=\\\"k Subscript e f f Superscript 2\\\" data-semantic-type=\\\"subsup\\\"><mi data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic-parent=\\\"9\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\">k</mi><mrow data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:unit\\\" data-semantic-children=\\\"1,2,3\\\" data-semantic-content=\\\"4,5\\\" data-semantic-parent=\\\"9\\\" data-semantic-role=\\\"implicit\\\" data-semantic-type=\\\"infixop\\\"><mi data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\">e</mi><mo data-semantic-=\\\"\\\" data-semantic-added=\\\"true\\\" data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\">⁢</mo><mi data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\">f</mi><mo data-semantic-=\\\"\\\" data-semantic-added=\\\"true\\\" data-semantic-operator=\\\"infixop,⁢\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"multiplication\\\" data-semantic-type=\\\"operator\\\">⁢</mo><mi data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"italic\\\" data-semantic-parent=\\\"6\\\" data-semantic-role=\\\"latinletter\\\" data-semantic-type=\\\"identifier\\\">f</mi></mrow><mn data-semantic-=\\\"\\\" data-semantic-annotation=\\\"clearspeak:simple\\\" data-semantic-font=\\\"normal\\\" data-semantic-parent=\\\"9\\\" data-semantic-role=\\\"integer\\\" data-semantic-type=\\\"number\\\">2</mn></msubsup></mrow>$k_{e f f}^{2}$</annotation></semantics></math></mjx-assistive-mml></mjx-container> of 4.6%. This result demonstrates a significant potential of AlScN films with the a-plane orientation in RF application.\",\"PeriodicalId\":54619,\"journal\":{\"name\":\"Physica Status Solidi-Rapid Research Letters\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.5000,\"publicationDate\":\"2024-02-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Physica Status Solidi-Rapid Research Letters\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1002/pssr.202300443\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physica Status Solidi-Rapid Research Letters","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1002/pssr.202300443","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

摘要

在这项工作中，开发了一种基于压电薄膜的高质量 Al0.56Sc0.44N(112¯0)$left(\right. 11 \bar{2} 0 \left.\right)$表面声波（SAW）谐振器。通过反应磁控溅射，Al0.56Sc0.44N沉积在r面Al2O3（11¯02）$\left(\right. 1 \bar{1} 02 \left.\right)$基底上。X 射线衍射（XRD）光谱显示生长出的 Al0.56Sc0.44N 薄膜是单相和 a 面取向的。X 射线衍射摇摆曲线的 FWHM 仅为 0.4°，小于大多数报告值。通过配备分层级联技术的三维有限元法，研究了压电层归一化厚度、电极材料和厚度对声表面波谐振器声学特性的影响。随着电极金属质量的增加，谐振频率单调递减。对于带有铂电极的器件，可以观察到机电耦合系数（keff2$k_{e f f}^{2}$）呈现出非线性特征，即随着电极厚度的增加先增加后减小。利用非极性 a 面 Al0.56Sc0.44N 薄膜制作的声表面波谐振器显示出极高的 keff2$k_{e f f}^{2}$，达到 4.6%。这一结果证明了具有 a 平面取向的 AlScN 薄膜在射频应用中的巨大潜力。

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Theoretical and experimental study of high electromechanical coupling SAW resonators based on a-plane ( 11 2 ¯ 0 ) Al0.56Sc0.44N films

In this work, a high-quality Al_0.56Sc_0.44N

(11 \bar{2} 0) $\left(\right. 11 \bar{2} 0 \left.\right)$

piezoelectric thin film-based surface acoustic wave (SAW) resonator was developed. The Al_0.56Sc_0.44N was deposited on a r-plane Al₂O₃

(1 \bar{1} 02) $\left(\right. 1 \bar{1} 02 \left.\right)$

substrate by reactive magnetron sputtering. X-ray diffraction (XRD) spectroscopy showed that the grown Al_0.56Sc_0.44N films are single-phased and a-plane oriented. The FWHM of the XRD rocking curve is only 0.4°, which is smaller than most of the reported values. The effects of normalized thickness of the piezoelectric layer, electrode materials and thickness on acoustic properties of the SAW resonators were investigated through the 3D finite element method equipped with the hierarchical cascading technique. A monotonically decreasing resonant frequency can be obtained with the mass loading of both the electrode metals. For the devices with a Pt electrode, it is observed that the electromechanical coupling coefficient (

k_{e f f}^{2} $k_{e f f}^{2}$

) exhibits a nonlinear characteristic of first increasing and then decreasing with the increase of electrode thickness. SAW resonators with a nonpolar a-plane Al_0.56Sc_0.44N thin films were fabricated, showing an exceptionally high

k_{e f f}^{2} $k_{e f f}^{2}$

of 4.6%. This result demonstrates a significant potential of AlScN films with the a-plane orientation in RF application.

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来源期刊

Physica Status Solidi-Rapid Research Letters 物理-材料科学：综合

CiteScore

5.20

自引率

3.60%

发文量

208

审稿时长

1.4 months

期刊介绍： Physica status solidi (RRL) - Rapid Research Letters was designed to offer extremely fast publication times and is currently one of the fastest double peer-reviewed publication media in solid state and materials physics. Average times are 11 days from submission to first editorial decision, and 12 days from acceptance to online publication. It communicates important findings with a high degree of novelty and need for express publication, as well as other results of immediate interest to the solid-state physics and materials science community. Published Letters require approval by at least two independent reviewers. The journal covers topics such as preparation, structure and simulation of advanced materials, theoretical and experimental investigations of the atomistic and electronic structure, optical, magnetic, superconducting, ferroelectric and other properties of solids, nanostructures and low-dimensional systems as well as device applications. Rapid Research Letters particularly invites papers from interdisciplinary and emerging new areas of research.