快速扫描模式下热效应对纳米棒扫描电镜对比度的影响研究

IF 0.7 4区 工程技术 Q3 MATHEMATICS, APPLIED
Peng Zhang
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引用次数: 0

摘要

现代扫描电子显微镜(SEM)经常采用多帧堆叠技术,以最大限度地减少振动和漂移,但却忽略了电子束引起的热效应(称为热辐射)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study on Thermal Effect on the SEM Contrast of a Nanorod in a Fast Scanning Mode
Modern scanning electron imaging (SEM) frequently adopts the multi-frame stacking technique to minimize the vibration and drift but ignores the electron beam-induced thermal effect (called thermal ...
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来源期刊
Journal of Computational and Theoretical Transport
Journal of Computational and Theoretical Transport Mathematics-Mathematical Physics
CiteScore
1.30
自引率
0.00%
发文量
15
期刊介绍: Emphasizing computational methods and theoretical studies, this unique journal invites articles on neutral-particle transport, kinetic theory, radiative transfer, charged-particle transport, and macroscopic transport phenomena. In addition, the journal encourages articles on uncertainty quantification related to these fields. Offering a range of information and research methodologies unavailable elsewhere, Journal of Computational and Theoretical Transport brings together closely related mathematical concepts and techniques to encourage a productive, interdisciplinary exchange of ideas.
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