通过混合 HiPIMS/DCMS 共溅射二硼化物靶生长的超硬抗氧化 Ti1-xAlxBy 薄膜，无需外部基底加热

{"title":"通过混合 HiPIMS/DCMS 共溅射二硼化物靶生长的超硬抗氧化 Ti1-xAlxBy 薄膜，无需外部基底加热","authors":"B. Wicher, A.V. Pshyk, X. Li, B. Bakhit, V. Rogoz, I. Petrov, L. Hultman, G. Greczynski","doi":"10.1016/j.matdes.2024.112727","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":506421,"journal":{"name":"Materials & Design","volume":"30 13","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Superhard oxidation-resistant Ti1-xAlxBy thin films grown by hybrid HiPIMS/DCMS co-sputtering diboride targets without external substrate heating\",\"authors\":\"B. Wicher, A.V. Pshyk, X. Li, B. Bakhit, V. Rogoz, I. Petrov, L. Hultman, G. Greczynski\",\"doi\":\"10.1016/j.matdes.2024.112727\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":506421,\"journal\":{\"name\":\"Materials & Design\",\"volume\":\"30 13\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-02-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials & Design\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1016/j.matdes.2024.112727\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials & Design","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/j.matdes.2024.112727","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}