用于高动态范围应用的近零热电射频功率传感器

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2023-11-16 DOI:10.1109/JMEMS.2023.3330574

Zhiqiang Zhang;Runqi Gu;Yifei Jiang;Yan Cui;Chunhua Cai

{"title":"用于高动态范围应用的近零热电射频功率传感器","authors":"Zhiqiang Zhang;Runqi Gu;Yifei Jiang;Yan Cui;Chunhua Cai","doi":"10.1109/JMEMS.2023.3330574","DOIUrl":null,"url":null,"abstract":"A novel broadband and thermoelectric RF power sensor with the near-zero power consumption is proposed for high dynamic range detection applications. This sensor is based on the RF power-heat-electricity operating principle and is fabricated using microelectromechanical systems (MEMS) and GaAs monolithic microwave integrated circuit (MMIC) processes. During operation, the device consumes no DC power and shows less than −24.2 dB reflection loss up to 25 GHz, due to the fully passive and simple impedance structure. The dynamic range of 42 dB is obtained without sacrificing linearity, due to the robust load and parallel thermocouple design. Experiments also show that the thermoelectric sensor itself can detect 500 mW of RF power. [2023-0134]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 1","pages":"9-11"},"PeriodicalIF":2.5000,"publicationDate":"2023-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Near-Zero Thermoelectric RF Power Sensor for High Dynamic Range Applications\",\"authors\":\"Zhiqiang Zhang;Runqi Gu;Yifei Jiang;Yan Cui;Chunhua Cai\",\"doi\":\"10.1109/JMEMS.2023.3330574\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel broadband and thermoelectric RF power sensor with the near-zero power consumption is proposed for high dynamic range detection applications. This sensor is based on the RF power-heat-electricity operating principle and is fabricated using microelectromechanical systems (MEMS) and GaAs monolithic microwave integrated circuit (MMIC) processes. During operation, the device consumes no DC power and shows less than −24.2 dB reflection loss up to 25 GHz, due to the fully passive and simple impedance structure. The dynamic range of 42 dB is obtained without sacrificing linearity, due to the robust load and parallel thermocouple design. Experiments also show that the thermoelectric sensor itself can detect 500 mW of RF power. [2023-0134]\",\"PeriodicalId\":16621,\"journal\":{\"name\":\"Journal of Microelectromechanical Systems\",\"volume\":\"33 1\",\"pages\":\"9-11\"},\"PeriodicalIF\":2.5000,\"publicationDate\":\"2023-11-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Microelectromechanical Systems\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10320128/\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Microelectromechanical Systems","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10320128/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

摘要

针对高动态范围检测应用，提出了一种功耗接近零的新型宽带热电射频功率传感器。该传感器基于射频功率-热-电工作原理，采用微机电系统（MEMS）和砷化镓单片微波集成电路（MMIC）工艺制造。由于采用了全无源和简单的阻抗结构，该器件在工作期间不消耗直流电源，在 25 GHz 频率范围内的反射损耗小于-24.2 dB。由于采用了稳健的负载和并联热电偶设计，在不牺牲线性度的情况下，动态范围达到 42 dB。实验还表明，热电传感器本身可以检测到 500 mW 的射频功率。[2023-0134]

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A Near-Zero Thermoelectric RF Power Sensor for High Dynamic Range Applications

A novel broadband and thermoelectric RF power sensor with the near-zero power consumption is proposed for high dynamic range detection applications. This sensor is based on the RF power-heat-electricity operating principle and is fabricated using microelectromechanical systems (MEMS) and GaAs monolithic microwave integrated circuit (MMIC) processes. During operation, the device consumes no DC power and shows less than −24.2 dB reflection loss up to 25 GHz, due to the fully passive and simple impedance structure. The dynamic range of 42 dB is obtained without sacrificing linearity, due to the robust load and parallel thermocouple design. Experiments also show that the thermoelectric sensor itself can detect 500 mW of RF power. [2023-0134]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.