混合床树脂为无故障半导体制造提供超纯水

Q2 Engineering

Membrane Technology Pub Date : 2024-01-01 DOI:10.12968/s0958-2118(24)70003-2

引用次数: 0

摘要

朗盛股份公司（Lanxess AG）开发出一种混床树脂，用于生成半导体生产所需的超纯水。与该公司已有的 Lewatit UltraPure 1296 MD 混床树脂相比，UltraPure 1296 MD PLUS 的铁、锌和钠等金属含量更低。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Mixed-bed resin produces ultra-pure water for fault-free semiconductor manufacturing

Lanxess AG has developed a mixed-bed resin for generating ultra-pure water that is required for producing semiconductors. Compared with the firm's established Lewatit UltraPure 1296 MD mixed bed resin, UltraPure 1296 MD PLUS boasts a lower content of metals such as iron, zinc and sodium.

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来源期刊

Membrane Technology Engineering-Industrial and Manufacturing Engineering

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