纳米/微尺度加工特性对金属薄膜表面载荷影响的研究

{"title":"纳米/微尺度加工特性对金属薄膜表面载荷影响的研究","authors":"In-Ho Jo, Seung-Hun Lee, Suyeon Kim, Mi-Jin Kum, Hae-In Hwang, Kwanoh Kim, Eun-chae Jeon, Jeong Hwan Kim","doi":"10.14775/ksmpe.2023.22.09.080","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":396753,"journal":{"name":"Journal of the Korean Society of Manufacturing Process Engineers","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Study on the Effects of the Nano-/Micro-scale Machining Processing Characteristics on the Load Applied to a Metal Thin Film Surface\",\"authors\":\"In-Ho Jo, Seung-Hun Lee, Suyeon Kim, Mi-Jin Kum, Hae-In Hwang, Kwanoh Kim, Eun-chae Jeon, Jeong Hwan Kim\",\"doi\":\"10.14775/ksmpe.2023.22.09.080\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":396753,\"journal\":{\"name\":\"Journal of the Korean Society of Manufacturing Process Engineers\",\"volume\":\"42 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-09-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of the Korean Society of Manufacturing Process Engineers\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.14775/ksmpe.2023.22.09.080\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Korean Society of Manufacturing Process Engineers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.14775/ksmpe.2023.22.09.080","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}