基于反应器壁水瞬态扩散和放气模型的碳纳米管产率的数量级提高

IF 2.4 3区 工程技术 Q3 ENGINEERING, MANUFACTURING
Golnaz Tomaraei, Moataz Abdulhafez, Mostafa Bedewy
{"title":"基于反应器壁水瞬态扩散和放气模型的碳纳米管产率的数量级提高","authors":"Golnaz Tomaraei, Moataz Abdulhafez, Mostafa Bedewy","doi":"10.1115/1.4063965","DOIUrl":null,"url":null,"abstract":"Abstract While reactor wall preconditioning was previously shown to influence the yield in chemical vapor deposition (CVD), especially for coatings of carbon nanotubes (CNTs), it was limited to studying accumulating deposits over a number of runs. However, the effects of temperature and duration as the reactor walls are exposed to hot humidity for an extended period of time between growth runs was not previously studied systematically. Here, we combine experimental measurements with a mathematical model to elucidate how thermochemical history of reactor walls impacts growth yield of vertically aligned CNT films. Importantly, we demonstrate one-order-of-magnitude higher CNT yield, by increasing the interim, i.e., the time between runs. We explain the results based on previously unexplored process sensitivity to trace amounts of oxygen-containing species in the reactor. In particular, we model the effect of small amounts of water vapor desorbing from reactor walls during growth. Our results reveal the outgassing dynamics, and show the underlying mechanism of generating growth promoting molecules. By installing a humidity sensor in our custom-designed multizone rapid thermal CVD reactor, we are able to uniquely correlate the amount of moisture within the reactor to real-time measurements of growth kinetics, as well as ex situ characterization of CNT alignment and atomic defects. Our findings enable a scientifically grounded approach toward both boosting growth yield and improving its consistency by reducing run-to-run variations. Accordingly, engineered dynamics recipes can be envisioned to leverage this effect for improving manufacturing process scalability and robustness.","PeriodicalId":16299,"journal":{"name":"Journal of Manufacturing Science and Engineering-transactions of The Asme","volume":"73 2","pages":"0"},"PeriodicalIF":2.4000,"publicationDate":"2023-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Order-of-Magnitude Increase in Carbon Nanotube Yield Based on Modeling Transient Diffusion and Outgassing of Water from Reactor Walls\",\"authors\":\"Golnaz Tomaraei, Moataz Abdulhafez, Mostafa Bedewy\",\"doi\":\"10.1115/1.4063965\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abstract While reactor wall preconditioning was previously shown to influence the yield in chemical vapor deposition (CVD), especially for coatings of carbon nanotubes (CNTs), it was limited to studying accumulating deposits over a number of runs. However, the effects of temperature and duration as the reactor walls are exposed to hot humidity for an extended period of time between growth runs was not previously studied systematically. Here, we combine experimental measurements with a mathematical model to elucidate how thermochemical history of reactor walls impacts growth yield of vertically aligned CNT films. Importantly, we demonstrate one-order-of-magnitude higher CNT yield, by increasing the interim, i.e., the time between runs. We explain the results based on previously unexplored process sensitivity to trace amounts of oxygen-containing species in the reactor. In particular, we model the effect of small amounts of water vapor desorbing from reactor walls during growth. Our results reveal the outgassing dynamics, and show the underlying mechanism of generating growth promoting molecules. By installing a humidity sensor in our custom-designed multizone rapid thermal CVD reactor, we are able to uniquely correlate the amount of moisture within the reactor to real-time measurements of growth kinetics, as well as ex situ characterization of CNT alignment and atomic defects. Our findings enable a scientifically grounded approach toward both boosting growth yield and improving its consistency by reducing run-to-run variations. Accordingly, engineered dynamics recipes can be envisioned to leverage this effect for improving manufacturing process scalability and robustness.\",\"PeriodicalId\":16299,\"journal\":{\"name\":\"Journal of Manufacturing Science and Engineering-transactions of The Asme\",\"volume\":\"73 2\",\"pages\":\"0\"},\"PeriodicalIF\":2.4000,\"publicationDate\":\"2023-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Manufacturing Science and Engineering-transactions of The Asme\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1115/1.4063965\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, MANUFACTURING\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Manufacturing Science and Engineering-transactions of The Asme","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1115/1.4063965","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
引用次数: 0

摘要

虽然反应器壁预处理以前被证明会影响化学气相沉积(CVD)的收率,特别是碳纳米管(CNTs)涂层,但它仅限于研究经过多次运行的累积沉积物。然而,温度和持续时间的影响,因为反应器壁暴露在热湿度中较长一段时间的生长运行之前没有系统地研究过。在这里,我们将实验测量与数学模型相结合,以阐明反应器壁的热化学历史如何影响垂直排列碳纳米管薄膜的生长收率。重要的是,我们证明了一个数量级更高的碳纳米管产量,通过增加中间时间,即运行之间的时间。我们根据之前未探索的反应器中痕量含氧物质的工艺敏感性来解释结果。特别是,我们模拟了在生长过程中从反应器壁上解吸少量水蒸气的影响。我们的研究结果揭示了脱气动力学,并揭示了产生促生长分子的潜在机制。通过在我们定制设计的多区快速热CVD反应器中安装湿度传感器,我们能够独特地将反应器内的湿度与生长动力学的实时测量相关联,以及碳纳米管排列和原子缺陷的非原位表征。我们的研究结果为通过减少跑对跑的变化来提高生长产量和提高其一致性提供了科学依据。因此,工程动力学配方可以设想利用这种效应来提高制造过程的可扩展性和稳健性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Order-of-Magnitude Increase in Carbon Nanotube Yield Based on Modeling Transient Diffusion and Outgassing of Water from Reactor Walls
Abstract While reactor wall preconditioning was previously shown to influence the yield in chemical vapor deposition (CVD), especially for coatings of carbon nanotubes (CNTs), it was limited to studying accumulating deposits over a number of runs. However, the effects of temperature and duration as the reactor walls are exposed to hot humidity for an extended period of time between growth runs was not previously studied systematically. Here, we combine experimental measurements with a mathematical model to elucidate how thermochemical history of reactor walls impacts growth yield of vertically aligned CNT films. Importantly, we demonstrate one-order-of-magnitude higher CNT yield, by increasing the interim, i.e., the time between runs. We explain the results based on previously unexplored process sensitivity to trace amounts of oxygen-containing species in the reactor. In particular, we model the effect of small amounts of water vapor desorbing from reactor walls during growth. Our results reveal the outgassing dynamics, and show the underlying mechanism of generating growth promoting molecules. By installing a humidity sensor in our custom-designed multizone rapid thermal CVD reactor, we are able to uniquely correlate the amount of moisture within the reactor to real-time measurements of growth kinetics, as well as ex situ characterization of CNT alignment and atomic defects. Our findings enable a scientifically grounded approach toward both boosting growth yield and improving its consistency by reducing run-to-run variations. Accordingly, engineered dynamics recipes can be envisioned to leverage this effect for improving manufacturing process scalability and robustness.
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来源期刊
CiteScore
6.80
自引率
20.00%
发文量
126
审稿时长
12 months
期刊介绍: Areas of interest including, but not limited to: Additive manufacturing; Advanced materials and processing; Assembly; Biomedical manufacturing; Bulk deformation processes (e.g., extrusion, forging, wire drawing, etc.); CAD/CAM/CAE; Computer-integrated manufacturing; Control and automation; Cyber-physical systems in manufacturing; Data science-enhanced manufacturing; Design for manufacturing; Electrical and electrochemical machining; Grinding and abrasive processes; Injection molding and other polymer fabrication processes; Inspection and quality control; Laser processes; Machine tool dynamics; Machining processes; Materials handling; Metrology; Micro- and nano-machining and processing; Modeling and simulation; Nontraditional manufacturing processes; Plant engineering and maintenance; Powder processing; Precision and ultra-precision machining; Process engineering; Process planning; Production systems optimization; Rapid prototyping and solid freeform fabrication; Robotics and flexible tooling; Sensing, monitoring, and diagnostics; Sheet and tube metal forming; Sustainable manufacturing; Tribology in manufacturing; Welding and joining
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