Mathematical Modeling of the Nonlinear Dynamics Components of Nanoelectromechanical Sensors taking into Account Thermal, Electrical and Noise Impacts

A mathematical model of the vibrations of nanoelectromechanical sensors components as a nanobeam connected to an electrode at small distance was built. Nano beam was in a stationary temperature field, under impact Casimir forces, transverse alternating load and additive color noise. Geometric nonlinearity was taken into account according to the theory of Karman. In the particular case of the dependence of the Casimir force - deflection for elastic preheated beams have been studied.