Impact Force Control of High-Speed Wire Bonding Machine Based on Fuzzy Active Disturbance Rejection Controller

Improving the dynamic performance of impact force control is one of the key factors to ensure the bonding quality in wire bonding processes of IC microelectronics products. A fuzzy active disturbance rejection control (fuzzy ADRC) method is proposed to reduce the impact force and the consequent fluctuation of the bonding head. This control method uses a fuzzy controller to automatically adjust the control parameters of the error feedback controller based on the standard ADRC. With this fuzzy ADRC control method, the overshoot of the bonding head positioning response can be effectively reduced, and the fluctuation of the impact force can be controlled within a small region. The dynamic simulation model of impact force is established, and the design process of fuzzy ADRC control strategy for bonding head servo system is described in detail. Compared with conventional PID and fuzzy PID, simulation and experimental results demonstrate that the fuzzy ADRC control method can achieve better performance in reducing the impact force overshoot and force fluctuation. Therefore, the fuzzy ADRC control method for high dynamic Z-axis motion can improve bonding quality.