薄膜厚度在线测量系统

P. He, Hongli Chang, Han Gao, ZiYi Wang
{"title":"薄膜厚度在线测量系统","authors":"P. He, Hongli Chang, Han Gao, ZiYi Wang","doi":"10.1109/ICCSNT.2017.8343748","DOIUrl":null,"url":null,"abstract":"Measuring Film Thickness is not only an important part for controlling the precision of the products, but also can reduce the cost. This system is based on the core processor (TMS32-0F2812), and it has four parts: optical signal driving circuit, analog signal acquisition and processing circuit, data sampling and processing circuit and human machine interaction. This system uses CCS software development platform as its software development environment, and it meets all functional requirements through programming and debugging.","PeriodicalId":163433,"journal":{"name":"2017 6th International Conference on Computer Science and Network Technology (ICCSNT)","volume":"110 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The online system of measuring film thickness\",\"authors\":\"P. He, Hongli Chang, Han Gao, ZiYi Wang\",\"doi\":\"10.1109/ICCSNT.2017.8343748\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Measuring Film Thickness is not only an important part for controlling the precision of the products, but also can reduce the cost. This system is based on the core processor (TMS32-0F2812), and it has four parts: optical signal driving circuit, analog signal acquisition and processing circuit, data sampling and processing circuit and human machine interaction. This system uses CCS software development platform as its software development environment, and it meets all functional requirements through programming and debugging.\",\"PeriodicalId\":163433,\"journal\":{\"name\":\"2017 6th International Conference on Computer Science and Network Technology (ICCSNT)\",\"volume\":\"110 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 6th International Conference on Computer Science and Network Technology (ICCSNT)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICCSNT.2017.8343748\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 6th International Conference on Computer Science and Network Technology (ICCSNT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICCSNT.2017.8343748","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

薄膜厚度的测量不仅是控制产品精度的重要环节,而且可以降低成本。本系统以TMS32-0F2812为核心处理器,由光信号驱动电路、模拟信号采集与处理电路、数据采样与处理电路和人机交互四个部分组成。本系统采用CCS软件开发平台作为软件开发环境,经过编程和调试,满足了系统的各项功能需求。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The online system of measuring film thickness
Measuring Film Thickness is not only an important part for controlling the precision of the products, but also can reduce the cost. This system is based on the core processor (TMS32-0F2812), and it has four parts: optical signal driving circuit, analog signal acquisition and processing circuit, data sampling and processing circuit and human machine interaction. This system uses CCS software development platform as its software development environment, and it meets all functional requirements through programming and debugging.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信