{"title":"用双端装置电化学沉积氧化锌薄膜","authors":"Amer Safri Hamidi, M. Abidin","doi":"10.1109/RSM.2017.8069136","DOIUrl":null,"url":null,"abstract":"This paper reports on deposition process of Zinc Oxide (ZnO) using a simple electrochemical approach. The ZnO thin film was deposited on the Aluminium (Al) substrate in an aqueous solution of Zinc Chloride (ZnCl2) at room temperature using two terminals electrochemical cell that consisted of positive and negative electrodes. Two types of Al substrate were used, which are Al foil and Al plate. Al foil or Al plate acted as the negative electrode (cathode) while Platinum (Pt) wire or Zinc (Zn) plate as the positive electrode (anode). A constant current density of 10 A/m2 was applied in the experiment. 5mM ZnCh and 0.1M potassium chloride (KCl) support solution used as the electrolytic solution. The experiment was carried out by varying the concentration of ZnCl2 electrolyte solution and KCl supporting solution. Three different mixture of electrolyte solution and supporting solution, 125 ml of ZnCl2 + 25 ml of KCl, 100 ml of ZnCl2 + 50 ml KCl and lastly 75 ml ZnCl2 + 75 ml KCl, were used. Each of the samples underwent 30 minutes of deposition process. At the end of the experiment, the morphologies and properties of ZnO were determined by studying the result from Single Electron Microscope (SEM) and Energy Dispersive X-ray spectroscopy (EDX). The structures of the ZnO were found as nanosheet-like network. The results evinced the potential of utilizing simpler setup of electrochemical approach in producing good characteristic of ZnO film for respective applications such as solar cell.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Electrochemical deposition of Zinc Oxide thin film using two-terminal setup\",\"authors\":\"Amer Safri Hamidi, M. Abidin\",\"doi\":\"10.1109/RSM.2017.8069136\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports on deposition process of Zinc Oxide (ZnO) using a simple electrochemical approach. The ZnO thin film was deposited on the Aluminium (Al) substrate in an aqueous solution of Zinc Chloride (ZnCl2) at room temperature using two terminals electrochemical cell that consisted of positive and negative electrodes. Two types of Al substrate were used, which are Al foil and Al plate. Al foil or Al plate acted as the negative electrode (cathode) while Platinum (Pt) wire or Zinc (Zn) plate as the positive electrode (anode). A constant current density of 10 A/m2 was applied in the experiment. 5mM ZnCh and 0.1M potassium chloride (KCl) support solution used as the electrolytic solution. The experiment was carried out by varying the concentration of ZnCl2 electrolyte solution and KCl supporting solution. Three different mixture of electrolyte solution and supporting solution, 125 ml of ZnCl2 + 25 ml of KCl, 100 ml of ZnCl2 + 50 ml KCl and lastly 75 ml ZnCl2 + 75 ml KCl, were used. Each of the samples underwent 30 minutes of deposition process. At the end of the experiment, the morphologies and properties of ZnO were determined by studying the result from Single Electron Microscope (SEM) and Energy Dispersive X-ray spectroscopy (EDX). The structures of the ZnO were found as nanosheet-like network. The results evinced the potential of utilizing simpler setup of electrochemical approach in producing good characteristic of ZnO film for respective applications such as solar cell.\",\"PeriodicalId\":215909,\"journal\":{\"name\":\"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)\",\"volume\":\"55 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/RSM.2017.8069136\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RSM.2017.8069136","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
摘要
本文报道了一种简单的电化学方法沉积氧化锌(ZnO)的过程。采用正负极双端电化学电池,在室温下将ZnO薄膜沉积在氯化锌(ZnCl2)水溶液中的铝衬底上。使用了两种类型的铝衬底,即铝箔和铝板。铝箔或铝板作为负极(阴极),铂(Pt)线或锌(Zn)板作为正极(阳极)。实验采用恒电流密度为10 A/m2。电解液采用5mM ZnCh和0.1M氯化钾(KCl)支撑液。实验通过改变ZnCl2电解质溶液和KCl支撑溶液的浓度进行。使用三种不同的电解质溶液和支撑溶液,125 ml ZnCl2 + 25 ml KCl, 100 ml ZnCl2 + 50 ml KCl,最后75 ml ZnCl2 + 75 ml KCl。每个样品都经历了30分钟的沉积过程。实验结束时,通过单电子显微镜(SEM)和能量色散x射线能谱(EDX)对ZnO的形貌和性能进行了研究。ZnO的结构为纳米片状网络。结果表明,利用简单的电化学方法制备出具有良好性能的ZnO薄膜,可用于太阳能电池等相关应用。
Electrochemical deposition of Zinc Oxide thin film using two-terminal setup
This paper reports on deposition process of Zinc Oxide (ZnO) using a simple electrochemical approach. The ZnO thin film was deposited on the Aluminium (Al) substrate in an aqueous solution of Zinc Chloride (ZnCl2) at room temperature using two terminals electrochemical cell that consisted of positive and negative electrodes. Two types of Al substrate were used, which are Al foil and Al plate. Al foil or Al plate acted as the negative electrode (cathode) while Platinum (Pt) wire or Zinc (Zn) plate as the positive electrode (anode). A constant current density of 10 A/m2 was applied in the experiment. 5mM ZnCh and 0.1M potassium chloride (KCl) support solution used as the electrolytic solution. The experiment was carried out by varying the concentration of ZnCl2 electrolyte solution and KCl supporting solution. Three different mixture of electrolyte solution and supporting solution, 125 ml of ZnCl2 + 25 ml of KCl, 100 ml of ZnCl2 + 50 ml KCl and lastly 75 ml ZnCl2 + 75 ml KCl, were used. Each of the samples underwent 30 minutes of deposition process. At the end of the experiment, the morphologies and properties of ZnO were determined by studying the result from Single Electron Microscope (SEM) and Energy Dispersive X-ray spectroscopy (EDX). The structures of the ZnO were found as nanosheet-like network. The results evinced the potential of utilizing simpler setup of electrochemical approach in producing good characteristic of ZnO film for respective applications such as solar cell.