环氧-石英封装锯片应变传感器的应变灵敏度

2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA) Pub Date : 2019-11-01 DOI:10.1109/SPAWDA48812.2019.9019238

Pengfei Li, Hong-lang Li, Li-na Cheng, Yabing Ke, Yahui Tian

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引用次数: 3

摘要

本文分析了一种新型简化环氧石英封装的SAW应变传感器。用微扰理论和有限元法从理论上计算了环氧石英封装传感器的应变灵敏度。灵敏度接近传统AQP的灵敏度，分别为3.20 ppm / με和3.32 ppm / με。然后采用环氧EP-4胶粘剂制备了环氧石英封装433MHz SAW应变传感器。搭建实验平台，在20℃下测量了环氧石英封装材料的应变灵敏度。实验结果表明，环氧石英封装的应变灵敏度为2.51 ppm / με，与理论结果基本一致。因此，本文验证了一种新的具有较高应变灵敏度的SAW应变传感器简化封装。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Strain Sensitivity of Epoxy-Quartz Packaged Saw Strain Sensors

A SAW strain sensor with new simplified Epoxy-Quartz packaging is analyzed in this paper. The strain sensitivity of sensors with Epoxy-Quartz Package is calculated with perturbation theory and finite element method theoretically. The sensitivity is close to the sensitivities of traditional AQP, which are 3.20 ppm / με and 3.32 ppm / με respectively. Then an Epoxy-Quartz Packaged 433MHz SAW strain sensor is fabricated by using the epoxy EP-4 adhesive. An experimental platform is set up and the strain sensitivity of Epoxy-Quartz Packaged is measured at 20 °C. The experimental results indicate that strain sensitivity of Epoxy-Quartz Packaged is 2.51 ppm / με, which almost agrees with theoretical results. Therefore, a new simplified package for SAW strain sensor with a relatively high strain sensitivity is verified in this paper.

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来源期刊

2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA)

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