基于热板的电导单片CMOS气体传感器系统

2003 Symposium on VLSI Circuits. Digest of Technical Papers (IEEE Cat. No.03CH37408) Pub Date : 2003-06-12 DOI:10.1109/VLSIC.2003.1221188

D. Barrettino, M. Graf, S. Taschini, M. Zimmermann, C. Hagleitner, A. Hierlemann, H. Baltes

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引用次数: 9

摘要

提出了一种采用后cmos微加工技术，采用工业cmos技术制作的单片电导气体传感器系统，该系统包括一个二氧化锡覆盖的微热板、一个数字温度控制器(200-350/spl℃/spl plusmn/2/spl℃)、一个二氧化锡电阻的对数转换器和一个串行接口。所有必要的驱动电路和A/D转换单元都在芯片上实现。芯片通信采用I2C数字标准接口。气体测试证明一氧化碳的检测极限低于1 ppm。

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Hotplate-based conductometric monolithic CMOS gas sensor system

A single-chip conductometric gas sensor system fabricated in industrial CMOS-technology with post-CMOS micromachining is presented, which comprises a tin dioxide-covered microhotplate, a digital temperature controller (200-350/spl deg/C/spl plusmn/2/spl deg/C), a logarithmic converter for the tin dioxide resistor and a serial interface. All necessary driving circuitry and A/D conversion units were realized on chip. The chip communication is handled with an I2C digital standard interface. Gas tests evidenced a detection limit below 1 ppm for carbon monoxide.

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来源期刊

2003 Symposium on VLSI Circuits. Digest of Technical Papers (IEEE Cat. No.03CH37408)

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