基于nems的绝缘体上硅光相位调制器

8th IEEE International Conference on Group IV Photonics Pub Date : 2011-11-01 DOI:10.1109/GROUP4.2011.6053820

K. Van Acoleyen, J. Roels, T. Claes, D. van Thourhout, R. Baets

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引用次数: 13

摘要

我们提出了一种紧凑的低功率光相位调制器，该调制器是由下蚀刻槽波导组成的。通过在9 μ m长的槽波导上施加15V的电压，观察到60°的光学相位变化。

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NEMS-based optical phase modulator fabricated on Silicon-On-Insulator

We present a compact low-power optical phase modulator on Silicon-On-Insulator consisting of an under-etched slot waveguide. By applying a voltage of 15V across a 9µm long slot waveguide an optical phase change of 60° was observed.

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8th IEEE International Conference on Group IV Photonics

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