具有过程时间不确定性的多集群工具性能评估与调度优化

2006 IEEE International Conference on Automation Science and Engineering Pub Date : 2006-10-01 DOI:10.1109/COASE.2006.326864

Shengwei Ding, J. Yi, M. Zhang, Raha Akhavan-Tabatabaei

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引用次数: 2

摘要

集群工具的性能评估和调度优化具有挑战性，特别是在过程时间具有不确定性的情况下。本文采用关键路径法(CPM)来分析具有固定动作序列的多集群工具的吞吐量。研究并整合了非关键路径动作的松弛，以求出聚类工具的平均周期时间。本文以Novellus的一个薄膜工具为例来解释这种方法

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Performance Evaluation and Schedule Optimization of Multi-Cluster Tools with Process Times Uncertainty

Performance evaluation and schedule optimization of cluster tools is challenging, especially when the process times are with uncertainty. In this paper, the critical path method (CPM) is used to analyze the throughput of multi-cluster tools with fixed action sequence. Slacks of non-critical path actions are studied and integrated to find the average cycle time of the cluster tool. A thin film tool from Novellus is used as an example to explain this methodology

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2006 IEEE International Conference on Automation Science and Engineering

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