{"title":"AgTa0.5Nb0.5O3薄膜变容体在不同衬底上的微波性能","authors":"Jang-Yong Kim, A. Grishin","doi":"10.1109/ISAF.2006.4387906","DOIUrl":null,"url":null,"abstract":"AgTa<sub>0.5</sub>Nb<sub>0.5</sub>O<sub>3</sub> (ATN) 400 nm thick films have been sintered by pulsed laser deposition technique on LaAIO<sub>3</sub> (001), sapphire (Al<sub>2</sub>O<sub>3</sub>-011_2, r-cut) single crystal substrates and Corning 7059 glass. Photolithography and metal lift-off technique were used to fabricate tunable coplanar waveguide interdigital capacitors (CPWIDCs). On-wafer test of varactors was performed with microwave network analyzer and G-S-G microwave probe. ATN/LaAIO<sub>3</sub> capacitors demonstrated the highest tunability (~5.8%@20GHz), ATN/Glass showed the best flat dispersion (-3.9%) and ATN/ AI<sub>2</sub>O<sub>3</sub> showed the lowest loss tangent (~0.06@20GHz) in the microwave range from 1 to 40 GHz.","PeriodicalId":441219,"journal":{"name":"2006 15th ieee international symposium on the applications of ferroelectrics","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Microwave Properties of AgTa0.5Nb0.5O3 Thin Film Varactors on Various Substrates\",\"authors\":\"Jang-Yong Kim, A. Grishin\",\"doi\":\"10.1109/ISAF.2006.4387906\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"AgTa<sub>0.5</sub>Nb<sub>0.5</sub>O<sub>3</sub> (ATN) 400 nm thick films have been sintered by pulsed laser deposition technique on LaAIO<sub>3</sub> (001), sapphire (Al<sub>2</sub>O<sub>3</sub>-011_2, r-cut) single crystal substrates and Corning 7059 glass. Photolithography and metal lift-off technique were used to fabricate tunable coplanar waveguide interdigital capacitors (CPWIDCs). On-wafer test of varactors was performed with microwave network analyzer and G-S-G microwave probe. ATN/LaAIO<sub>3</sub> capacitors demonstrated the highest tunability (~5.8%@20GHz), ATN/Glass showed the best flat dispersion (-3.9%) and ATN/ AI<sub>2</sub>O<sub>3</sub> showed the lowest loss tangent (~0.06@20GHz) in the microwave range from 1 to 40 GHz.\",\"PeriodicalId\":441219,\"journal\":{\"name\":\"2006 15th ieee international symposium on the applications of ferroelectrics\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 15th ieee international symposium on the applications of ferroelectrics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2006.4387906\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 15th ieee international symposium on the applications of ferroelectrics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2006.4387906","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Microwave Properties of AgTa0.5Nb0.5O3 Thin Film Varactors on Various Substrates
AgTa0.5Nb0.5O3 (ATN) 400 nm thick films have been sintered by pulsed laser deposition technique on LaAIO3 (001), sapphire (Al2O3-011_2, r-cut) single crystal substrates and Corning 7059 glass. Photolithography and metal lift-off technique were used to fabricate tunable coplanar waveguide interdigital capacitors (CPWIDCs). On-wafer test of varactors was performed with microwave network analyzer and G-S-G microwave probe. ATN/LaAIO3 capacitors demonstrated the highest tunability (~5.8%@20GHz), ATN/Glass showed the best flat dispersion (-3.9%) and ATN/ AI2O3 showed the lowest loss tangent (~0.06@20GHz) in the microwave range from 1 to 40 GHz.
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