氧化锌薄膜电性能的研究

2008 IEEE Conference on Innovative Technologies in Intelligent Systems and Industrial Applications Pub Date : 2008-07-12 DOI:10.1109/CITISIA.2008.4607347

A. Halim, H. Hashim, M. Rusop, M. H. Mamat, A. Zoolfakar

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引用次数: 17

摘要

本课题主要研究退火温度对沉积氧化锌薄膜电性能的影响。采用自旋镀膜技术将醋酸锌脱水(ZnAC)、2-甲氧基乙醇和单乙醇胺(MEA)制成氧化锌溶液沉积在玻璃衬底上。沉积的薄膜在炉内(提前炉)在350摄氏度到500摄氏度的不同温度下退火1小时。研究了退火温度对材料电性能的影响。电性能采用电流-电压(I-V)测量单元(Advantest R6243)进行表征。I-V表征表明，随着退火温度的升高，薄膜呈现欧姆接触，电阻率降低。这表明，当退火温度达到500℃时，薄膜的电性能得到改善。

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Study on electrical properties of Zinc Oxide thin film

This project focuses on the effect of annealing temperature to electrical properties of deposited Zinc Oxide (ZnO) thin film. ZnO solutions made from Zinc acetate dehydrate (ZnAC), 2-Methoxyethanol and monoethanolmine (MEA) are deposited onto glass substrates using spin coating technique. Deposited films are annealed at various temperatures from 350degC to 500degC in the furnace (Preterm Furnace) for 1 hour. The effect of annealing temperature on the electrical properties is investigated. The electrical properties are characterized using Current-Voltage (I-V) measurement unit (Advantest R6243). I-V characterization shows the films exhibited ohmic contact and the resistivity decreased when annealing temperature increased. This indicates that the electrical properties of the films improved with higher annealing temperature up to 500degC.

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2008 IEEE Conference on Innovative Technologies in Intelligent Systems and Industrial Applications

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