气溶胶沉积PZT薄膜在毫米波范围内的介电特性

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI:10.1109/ISAF.2007.4393319

M. Nakada, K. Ohashi, H. Tsuda, E. Kawate, J. Akedo

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引用次数: 1

摘要

采用气溶胶沉积(AD)法制备了锆钛酸铅[PZT, Pb(Zr0.3Ti0.7)O3]薄膜，对其在毫米波和太赫兹范围内的介电性能进行了测试。采用毫米波光谱对45 ~ 80 GHz频段进行测量，对120 GHz ~ 20 THz频段进行远红外傅立叶变换测量。结合德拜松弛频率和谐波振子分布的德拜模型对光谱数据进行了分析。我们清楚地观察到退火后的AD薄膜在几十GHz以下发生德拜弛豫。毫米波与太赫兹光谱相结合是测量铁电材料介电性能的有效方法。

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Dielectric Characteristics of PZT Films Prepared by Aerosol Deposition in Millimeter Wave Range

The dielectric properties of lead zirconate titanate [PZT, Pb(Zr0.3Ti0.7)O3] films, prepared by aerosol deposition (AD), were measured in the millimeter wave and THz range. Millimeter wave spectroscopy was applied for measurement in the frequency range from 45 to 80 GHz, and far-infrared Fourier transform measurements from 120 GHz to 20 THz was carried out. Spectroscopic data were analyzed with combination of Debye model with a distribution of Debye relaxation frequencies and harmonic oscillators. We clearly observed that the Debye relaxation took place below several tens GHz for annealed AD films. Combination of millimeter wave and THz spectroscopy was effective measurement technique for dielectric properties of ferroelectric materials at over millimeter wave range.

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2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics

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