{"title":"封面:第11326卷","authors":"","doi":"10.1117/12.2571086","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":247869,"journal":{"name":"Advances in Patterning Materials and Processes XXXVII","volume":"54 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Front Matter: Volume 11326\",\"authors\":\"\",\"doi\":\"10.1117/12.2571086\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":247869,\"journal\":{\"name\":\"Advances in Patterning Materials and Processes XXXVII\",\"volume\":\"54 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-05-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Advances in Patterning Materials and Processes XXXVII\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2571086\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advances in Patterning Materials and Processes XXXVII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2571086","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}