P. de Moor, Y. Creten, C. Goessens, B. Grietens, V. Leonov, J. Vermeiren, C. van Hoof
{"title":"利用线性阵列的聚SiGe非冷却微辐射热计进行热红外探测","authors":"P. de Moor, Y. Creten, C. Goessens, B. Grietens, V. Leonov, J. Vermeiren, C. van Hoof","doi":"10.1109/ICM.2003.238498","DOIUrl":null,"url":null,"abstract":"In this paper, we discuss the SiGe technology for uncooled microbolometer arrays of small format, ie 200/spl times/1 and 14/spl times/14, is transferred from IMEC to XenICs allowing of the poly-SiGe arrays for application in non-contact temperature measurements, infrared spectroscopy, technological process monitoring, quality control, etc. The arrays demonstrate an exceptional uniformity, about 100% pixel yield, 100% operability, and a NETD of about 100 mK at a readout level. These advantages combined with a possibility of hermetic zero-level micropacking make the SiGe technology a proper one for the low-cost production of infrared arrays.","PeriodicalId":180690,"journal":{"name":"Proceedings of the 12th IEEE International Conference on Fuzzy Systems (Cat. No.03CH37442)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Thermal infrared detection using linear arrays of poly SiGe uncooled microbolometers\",\"authors\":\"P. de Moor, Y. Creten, C. Goessens, B. Grietens, V. Leonov, J. Vermeiren, C. van Hoof\",\"doi\":\"10.1109/ICM.2003.238498\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we discuss the SiGe technology for uncooled microbolometer arrays of small format, ie 200/spl times/1 and 14/spl times/14, is transferred from IMEC to XenICs allowing of the poly-SiGe arrays for application in non-contact temperature measurements, infrared spectroscopy, technological process monitoring, quality control, etc. The arrays demonstrate an exceptional uniformity, about 100% pixel yield, 100% operability, and a NETD of about 100 mK at a readout level. These advantages combined with a possibility of hermetic zero-level micropacking make the SiGe technology a proper one for the low-cost production of infrared arrays.\",\"PeriodicalId\":180690,\"journal\":{\"name\":\"Proceedings of the 12th IEEE International Conference on Fuzzy Systems (Cat. No.03CH37442)\",\"volume\":\"3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 12th IEEE International Conference on Fuzzy Systems (Cat. No.03CH37442)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICM.2003.238498\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 12th IEEE International Conference on Fuzzy Systems (Cat. No.03CH37442)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICM.2003.238498","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Thermal infrared detection using linear arrays of poly SiGe uncooled microbolometers
In this paper, we discuss the SiGe technology for uncooled microbolometer arrays of small format, ie 200/spl times/1 and 14/spl times/14, is transferred from IMEC to XenICs allowing of the poly-SiGe arrays for application in non-contact temperature measurements, infrared spectroscopy, technological process monitoring, quality control, etc. The arrays demonstrate an exceptional uniformity, about 100% pixel yield, 100% operability, and a NETD of about 100 mK at a readout level. These advantages combined with a possibility of hermetic zero-level micropacking make the SiGe technology a proper one for the low-cost production of infrared arrays.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
