Yoshio Ichii, Hiromi Okada, S. Aono, Masahiko Kanaoka, Takato Inoue, S. Matsuyama, K. Yamauchi
{"title":"无胶变形镜的超精细造型","authors":"Yoshio Ichii, Hiromi Okada, S. Aono, Masahiko Kanaoka, Takato Inoue, S. Matsuyama, K. Yamauchi","doi":"10.1117/12.2594418","DOIUrl":null,"url":null,"abstract":"PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard x-ray regimes[1], however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. Therefore, we have developed a glue-free bimorph deformable mirror, in which silver nanoparticles were employed to bond PZT actuators to mirror substrates[2]. In this study, we achieved a 2 nm figure error on an elliptical shape of a glue-free deformable mirror. We evaluated the figure change characteristics due to humidity and temperature increasing at the ultrafine figure error condition.","PeriodicalId":114930,"journal":{"name":"Advances in X-Ray/EUV Optics and Components XVI","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ultrafine figuring for glue-free deformable mirror\",\"authors\":\"Yoshio Ichii, Hiromi Okada, S. Aono, Masahiko Kanaoka, Takato Inoue, S. Matsuyama, K. Yamauchi\",\"doi\":\"10.1117/12.2594418\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard x-ray regimes[1], however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. Therefore, we have developed a glue-free bimorph deformable mirror, in which silver nanoparticles were employed to bond PZT actuators to mirror substrates[2]. In this study, we achieved a 2 nm figure error on an elliptical shape of a glue-free deformable mirror. We evaluated the figure change characteristics due to humidity and temperature increasing at the ultrafine figure error condition.\",\"PeriodicalId\":114930,\"journal\":{\"name\":\"Advances in X-Ray/EUV Optics and Components XVI\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Advances in X-Ray/EUV Optics and Components XVI\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2594418\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advances in X-Ray/EUV Optics and Components XVI","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2594418","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Ultrafine figuring for glue-free deformable mirror
PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard x-ray regimes[1], however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. Therefore, we have developed a glue-free bimorph deformable mirror, in which silver nanoparticles were employed to bond PZT actuators to mirror substrates[2]. In this study, we achieved a 2 nm figure error on an elliptical shape of a glue-free deformable mirror. We evaluated the figure change characteristics due to humidity and temperature increasing at the ultrafine figure error condition.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
