{"title":"化学气相沉积法在铜箔上合成大面积单晶石墨烯畴的优化","authors":"C. Liang, Wenrong Wang, Tie Li, Yuelin Wang","doi":"10.1109/3M-NANO.2012.6472974","DOIUrl":null,"url":null,"abstract":"In this paper, a traditional chemical vapor deposition method for synthesis of single-crystal graphene domains on copper foils was optimized by modulating the growth parameters. This provided us a low-cost and high-yield method for large-area single-crystal graphene domain growth. By this way, single-crystal graphene domains larger than 10μm were synthesized with a gas flow of 1000sccm argon, 40sccm hydrogen and 1.5sccm low-concentration methane for 15min after 3h pre-annealing. The morphologies of as-synthesized samples were characterized by Raman spectrum, optical microscope and scanning electron microscope. The result showed that the 10μm graphene domains were monolayer single crystals.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Optimization on the synthesis of large-area single-crystal graphene domains by chemical vapor deposition on copper foils\",\"authors\":\"C. Liang, Wenrong Wang, Tie Li, Yuelin Wang\",\"doi\":\"10.1109/3M-NANO.2012.6472974\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, a traditional chemical vapor deposition method for synthesis of single-crystal graphene domains on copper foils was optimized by modulating the growth parameters. This provided us a low-cost and high-yield method for large-area single-crystal graphene domain growth. By this way, single-crystal graphene domains larger than 10μm were synthesized with a gas flow of 1000sccm argon, 40sccm hydrogen and 1.5sccm low-concentration methane for 15min after 3h pre-annealing. The morphologies of as-synthesized samples were characterized by Raman spectrum, optical microscope and scanning electron microscope. The result showed that the 10μm graphene domains were monolayer single crystals.\",\"PeriodicalId\":134364,\"journal\":{\"name\":\"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"volume\":\"54 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2012.6472974\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2012.6472974","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optimization on the synthesis of large-area single-crystal graphene domains by chemical vapor deposition on copper foils
In this paper, a traditional chemical vapor deposition method for synthesis of single-crystal graphene domains on copper foils was optimized by modulating the growth parameters. This provided us a low-cost and high-yield method for large-area single-crystal graphene domain growth. By this way, single-crystal graphene domains larger than 10μm were synthesized with a gas flow of 1000sccm argon, 40sccm hydrogen and 1.5sccm low-concentration methane for 15min after 3h pre-annealing. The morphologies of as-synthesized samples were characterized by Raman spectrum, optical microscope and scanning electron microscope. The result showed that the 10μm graphene domains were monolayer single crystals.