Horizontal Counter Control Method for Suppressing Vibration of Machine Base

This paper proposes a method for suppressing the vibration of machine bases by using a counter mass driving (CMD) system for fast and accurate positioning. In horizontal positioning systems, servo motors are widely used to drive a moving mass, but its reaction force causes the machine base on which the motors are mounted to vibrate. The CMD system, which drives an additional mass for vibration suppression, is well-known for its effectiveness. However, for practical uses, it is hard to design the performances of the system, e.g., positioning time, max torque, and range of motion. To suppress vibration and satisfy user requirements for performance, we devise a method for designing a vibration control filter analytically on the basis of a command shaping strategy. In experiments, we confirmed that the proposed method can suppress vibration and make the positioning time shorter by tuning the design parameters of the filter.