新型多探测器三角测量激光探头的研制

F. Shiou, W. Y. Cheng
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引用次数: 4

摘要

本文介绍了一种多探测器三角测量激光探头的设计与制造。根据Scheimpflug原理对所开发的系统进行了组态和装配。探头系统主要由一个二极管激光器、6个准直透镜、6个位置敏感探测器(PSD)、信号处理电路和a /D接口卡组成。通过对PSD的具体布置,可以为所开发的系统提供四种不同的测量模块,即标准三角测头模块、双三角测头模块、五边形三角测头模块和近似圆形三角测头模块。通过对五角形PSD信号的计算和滤波,提高了测量精度。将所研制的激光测头系统与三坐标测量机相结合,构成非接触式测量系统。实验结果表明,所研制的激光探测系统对不同表面粗糙度和坡度的测量不确定度约为15 μ m。在测试的四种不同的测量模块中,五边形三角形测头模块效果最好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of an innovative multi-detector triangulation laser probe
This study presents the design and manufacture of a prototype of a multi-detector triangulation laser probe. The developed system was configured and assembled based on the Scheimpflug principle. The probe system mainly consists of a diode laser, six collimating lenses, six position sensitive detectors (PSD), a signal processing circuit, and an A/D interface card. Through the specific arrangement of the PSD, four different measurement modules for the developed system are possible, namely the standard triangulation probe module, double triangulation probe module, pentagon-shaped triangulation probe module, and an approximately circular triangulation probe module. Bused on the calculation and filtering of the pentagon-shaped PSD signals, the measurement accuracy was improved. The developed laser probe system was integrated with a coordinate measuring machine, to construct a non-contact measurement system. According to the experimental results, the measurement uncertainty of the developed laser probe system, with respect to different surface roughness and slope, was about 15 microns. Among the four different measurement modules checked, the pentagon-shaped triangulation probe module has the best result.
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