交错模MEMS陀螺仪

2016 Fourth International Japan-Egypt Conference on Electronics, Communications and Computers (JEC-ECC) Pub Date : 2016-05-01 DOI:10.1109/JEC-ECC.2016.7518978

Ashraf Mahmoud, W. Fikry, Y. Sabry, M. Mahmoud

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引用次数: 5

摘要

本文提出了一种新的MEMS陀螺仪的设计概念，该陀螺仪包含一个具有交错频率响应的感测模式。考虑到二自由度的传感模式结构，带宽提高了40%以上。提出了一种基于双调谐电极的加工后静电调谐机构，以实现谐振频率微调。将该概念应用于基于SOI MUMPS工艺的全解耦陀螺仪的设计和分析，该陀螺仪工作在5 kHz的谐振频率附近。该概念可扩展到多自由度，以实现更宽的带宽扩展。

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Staggered mode MEMS gyroscope

This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency trimming. The concept is applied on the design and analysis of fully decoupled gyroscope based on the SOI MUMPS process and operating around a resonance frequency of 5 kHz. The concept is extendable for multi-degree of freedom for wider bandwidth extension.

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来源期刊

2016 Fourth International Japan-Egypt Conference on Electronics, Communications and Computers (JEC-ECC)

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