{"title":"装备仿真与综合特征尺度轮廓演化的结合","authors":"W. Pyka, S. Selberherr, V. Sukharev","doi":"10.1109/ESSDERC.2000.194744","DOIUrl":null,"url":null,"abstract":"We present three-dimensional linked reactor/feature scale simulations for integrated PVD/CVD deposition sequences applied to metal stack plug-fills. Monte-Carlo particle distributions as well as CVD equipment simulations have been incorporated into threedimensional profile evolution.","PeriodicalId":354721,"journal":{"name":"30th European Solid-State Device Research Conference","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Incorporation of Equipment Simulation into Integrated Feature Scale Profile Evolution\",\"authors\":\"W. Pyka, S. Selberherr, V. Sukharev\",\"doi\":\"10.1109/ESSDERC.2000.194744\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present three-dimensional linked reactor/feature scale simulations for integrated PVD/CVD deposition sequences applied to metal stack plug-fills. Monte-Carlo particle distributions as well as CVD equipment simulations have been incorporated into threedimensional profile evolution.\",\"PeriodicalId\":354721,\"journal\":{\"name\":\"30th European Solid-State Device Research Conference\",\"volume\":\"10 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-09-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"30th European Solid-State Device Research Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ESSDERC.2000.194744\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"30th European Solid-State Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSDERC.2000.194744","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Incorporation of Equipment Simulation into Integrated Feature Scale Profile Evolution
We present three-dimensional linked reactor/feature scale simulations for integrated PVD/CVD deposition sequences applied to metal stack plug-fills. Monte-Carlo particle distributions as well as CVD equipment simulations have been incorporated into threedimensional profile evolution.
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