太赫兹固态器件关键技术

2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium (EDAPS) Pub Date : 2017-12-01 DOI:10.1109/EDAPS.2017.8276915

Yong Zhang, Tianhao Ren, W. Zhao, Shuang Liu, Oupeng Li

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引用次数: 0

摘要

本文讨论了太赫兹固态器件的关键技术，包括半导体器件的建模技术、关键元件的设计和制造技术。

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Key technologies of solid state devices on terahertz

In this paper, we discuss the key technologies of solid state devices on terahertz, including the modeling technology of the semiconductor devices, design of the key components and the fabrication technology.

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2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium (EDAPS)

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