频率区半导体氧化物层的电物理、物理化学特性和气敏特性的测定系统

International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices Pub Date : 2012-07-02 DOI:10.1109/EDM.2012.6310269

N. Poluyanovich, M. Dubyago, V. V. Matsiborko

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引用次数: 0

摘要

研制了一种通过测量等效电路的电参数来测定气敏材料电物理和物理化学性质的装置。安装，用于测量100欧姆范围内1 MHz频率上的电阻抗…描述为5兆欧姆。介绍了纳米复合材料气敏性能的研究阶段，以及为气体传感器选择最佳GSM的研究过程。给出了阻抗模型的结构，并对其在气体传感器中的应用进行了展望。

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System of determination of electro - physical, physical - Chemical properties and gas - sensitive characteristics of semiconductor layers of oxides in frequency area

The installation for determination of electro-physical and physical - chemical properties of gas - sensitive materials (GSM) by means of measurement of electric parameters of an equivalent electric circuit was developed. Installation, for measurement of an electric impedance on frequencies by 1 MHz in a range of 100 Ohm ... 5 mega ohms is described . Stages of research of gas -sensitive properties of nano - composite materials and processes proceeding in them, for selection of the best GSM for gas sensors are described. Structures of impedance models are offered and prospects of their use for gas sensors are proved.

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International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices

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