{"title":"ISSM 2008执行委员会主席的话","authors":"Michihiro Inoue","doi":"10.1109/ISSM.2006.4492992","DOIUrl":null,"url":null,"abstract":"On behalf of the International Symposium on Semiconductor Manufacturing (ISSM) 2008 Executive Committee, it is a great pleasure and honor for us to have you at the seventeenth annual ISSM.","PeriodicalId":184890,"journal":{"name":"2008 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Message from ISSM 2008 Executive Committee chair\",\"authors\":\"Michihiro Inoue\",\"doi\":\"10.1109/ISSM.2006.4492992\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"On behalf of the International Symposium on Semiconductor Manufacturing (ISSM) 2008 Executive Committee, it is a great pleasure and honor for us to have you at the seventeenth annual ISSM.\",\"PeriodicalId\":184890,\"journal\":{\"name\":\"2008 International Symposium on Semiconductor Manufacturing (ISSM)\",\"volume\":\"27 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 International Symposium on Semiconductor Manufacturing (ISSM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSM.2006.4492992\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2006.4492992","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
On behalf of the International Symposium on Semiconductor Manufacturing (ISSM) 2008 Executive Committee, it is a great pleasure and honor for us to have you at the seventeenth annual ISSM.
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