集成光学相控阵应用的氮化硅CMOS平台

2021 IEEE 17th International Conference on Group IV Photonics (GFP) Pub Date : 2021-12-01 DOI:10.1109/GFP51802.2021.9673980

S. Ilie, P. Ginel-Moreno, J. Sagar, T. D. Bucio, A. Ortega-Moñux, K. Lekkas, T. Rutirawut, L. Mastronardi, I. Skandalos, K. Grabska, Í. Molina-Fernández, G. Kanellos, P. Cheben, F. Gardes

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引用次数: 1

摘要

我们展示了支持光探测和测距(LiDAR)和光开关等应用的器件和架构，包括色散光学相控阵(OPA)架构，氮化硅-铌酸锂绝缘体(SiN - LNOI)混合光相位调制器，以及用于光开关的可扩展架构。

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Silicon nitride CMOS platform for integrated optical phased arrays applications

We demonstrate devices and architectures enabling applications such as light detection and ranging (LiDAR) and optical switches, including dispersive optical phased array (OPA) architectures, a hybrid silicon nitride - lithium niobate on insulator (SiN - LNOI) optical phase modulator, and scalable architectures for optical switches.

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2021 IEEE 17th International Conference on Group IV Photonics (GFP)

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