近场共振在多层介质诊断中的应用

2010 10th International Conference on Laser and Fiber-Optical Networks Modeling Pub Date : 2010-11-09 DOI:10.1109/LFNM.2010.5624180

K. Gaikovich, P. K. Gaikovich

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引用次数: 0

摘要

研究了一种多层介质结构的相干近场探测方法。它基于亚波长探针(发射和接收)的现场测量，这些探针位于所研究结构上层上方的近场区域。这使得在层的深度控制下实现亚波长分辨率成为可能。特别是利用谐振响应可以实现高分辨率。例如，该方法可用于利用SNOM技术监测多层异质结构的外延。

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Near-field resonances in diagnostics of multilayered media

A method of the coherent near-field sounding of multilayered dielectric structures is studied. It is based on field measurements with subwavelength probes (emitting and receiving) that are spaced in the near-field zone above the upper layer of the studied structure. It makes possible to achieve a subwavelength resolution at the control of the layers' depth. Especially high resolution can be achieved using the resonant response. The developed approach can be used, for instance, for the monitoring of epitaxy of multilayered heterostructures using SNOM techniques.

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2010 10th International Conference on Laser and Fiber-Optical Networks Modeling

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