A 77-101GHz 6-Bit Vector-Modulated Phase Shifter with Low RMS Error in 65nm SOI CMOS

This paper presents a 77–101 GHz active 6-bit phase shifter based on a vector-modulated technique in 65 $n$ m SOI CMOS technology for W-band phased-array systems. Optimizations of the impedance-invariant variable gain amplifier (VGA) are performed to reduce the phase error and gain error among the phase states. In addition, a quadrature signal generator composed of a 90-degree hybrid and a pair of Marchand balun is exploited for wideband applications. The proposed phase shifter achieves 5.6° phase step, < 2.0° RMS phase error and < 0.8dB RMS gain error over 77–101 GHz. The total power consumption is 31mW and the core area of the phase shifter is only 0.2mm2.