纳米级制造中的能源使用

Proceedings of the 2006 IEEE International Symposium on Electronics and the Environment, 2006. Pub Date : 2006-04-26 DOI:10.1109/ISEE.2006.1650074

T.W. Zhang, Stephen P. Boyd, A. Vijayaraghavan, D. Dornfeld

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引用次数: 9

摘要

本文概述了关键的纳米级制造技术，并定性地考察了它们对能源需求的基本工艺要求。工艺要求与半导体制造相关，在适用的情况下，我们对生产规模上这些工艺的理解的差距被确定为研究界的目标。最后，本文提出了一个系统分析纳米级制造过程中能源使用的框架

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Energy Use in Nanoscale Manufacturing

This paper presents an overview of key nanoscale manufacturing technologies, and qualitatively examines their fundamental process requirements with respect to energy demand. The processes requirements are related to semiconductor manufacturing, where applicable, and gaps in our understanding of these processes on the production scale are identified as goals for the research community. Finally, the paper proposes a framework for the systematic analysis of energy use in nanoscale manufacturing processes

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Proceedings of the 2006 IEEE International Symposium on Electronics and the Environment, 2006.

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