薄膜气凝胶MEMS

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906494

S. Fan, C. Kim, Jong-Ah Paik, B. Dunn, P. Patterson, M. Wu

{"title":"薄膜气凝胶MEMS","authors":"S. Fan, C. Kim, Jong-Ah Paik, B. Dunn, P. Patterson, M. Wu","doi":"10.1109/MEMSYS.2001.906494","DOIUrl":null,"url":null,"abstract":"This paper reports the first successful incorporation of aerogel thin films for MEMS fabrication. We developed the photolithography procedures and various surface micromachining methods for highly porous thin films. The development is verified with micro bridges, cantilevers, and membranes made of aerogel thin films, completing the entire procedures for two aerogel thin films, silica and alumina. Also discussed will be the new opportunities that aerogel MEMS bring about.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"18","resultStr":"{\"title\":\"MEMS with thin-film aerogel\",\"authors\":\"S. Fan, C. Kim, Jong-Ah Paik, B. Dunn, P. Patterson, M. Wu\",\"doi\":\"10.1109/MEMSYS.2001.906494\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports the first successful incorporation of aerogel thin films for MEMS fabrication. We developed the photolithography procedures and various surface micromachining methods for highly porous thin films. The development is verified with micro bridges, cantilevers, and membranes made of aerogel thin films, completing the entire procedures for two aerogel thin films, silica and alumina. Also discussed will be the new opportunities that aerogel MEMS bring about.\",\"PeriodicalId\":311365,\"journal\":{\"name\":\"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)\",\"volume\":\"27 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-01-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"18\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2001.906494\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2001.906494","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 18

摘要

本文报道了首次成功地将气凝胶薄膜用于MEMS制造。我们开发了高多孔薄膜的光刻工艺和各种表面微加工方法。通过微桥、悬臂和由气凝胶薄膜制成的膜验证了这一发展，完成了两种气凝胶薄膜(二氧化硅和氧化铝)的整个过程。同时还将讨论气凝胶MEMS带来的新机遇。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

MEMS with thin-film aerogel

This paper reports the first successful incorporation of aerogel thin films for MEMS fabrication. We developed the photolithography procedures and various surface micromachining methods for highly porous thin films. The development is verified with micro bridges, cantilevers, and membranes made of aerogel thin films, completing the entire procedures for two aerogel thin films, silica and alumina. Also discussed will be the new opportunities that aerogel MEMS bring about.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

自引率

0.00%

发文量