用于光互连的集成微光学组件

Proceedings. 6th International Conference on Parallel Interconnects (PI'99) (Formerly Known as MPPOI) Pub Date : 1999-10-17 DOI:10.1109/PI.1999.806405

M. Feldman, H. Han, J. Stack, J. Mathews

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引用次数: 0

摘要

集成微光学系统(IMOS)是由多个光学元件组成的集成组件，这些组件使用半导体加工技术在晶圆级制造和组装。IMOS已被用于以具有成本效益的高度可制造的方式创建三维光学系统。准直透镜阵列的实验总往返插入损耗为每通道1.5 ~ 2.0 dB。

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Integrated micro-optical assemblies for optical interconnects

Integrated micro-optical systems (IMOS) are integrated assemblies of multiple optical components that are made and assembled at the wafer level using semiconductor processing techniques. IMOS has been used to create 3-dimensional optical systems in a cost-effective highly manufacturable manner. Collimated lens arrays have been fabricated with experimental total round trip insertion loss of 1.5-2.0 dB per channel.

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Proceedings. 6th International Conference on Parallel Interconnects (PI'99) (Formerly Known as MPPOI)

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