Integrated Photodiodes for DVD and CD-ROM Applications

An n /p-well/p-substrate photodiode (NPD) and an n /n-well/p-substrate photodiode (NND) on standard epitaxial and low doped epitaxial material were implemented in an industrial BiCMOS process. Both devices are fully BiCMOS compatible, so that no process modifications were necessary. A dB bandwidth of more than MHz was measured for the NND ( nm). Due to the modification of the epitaxial material the bandwidth of the NND is enhanced for nm, leading to a photodiode which is appropriate simultaneously for advanced CD-ROM and DVD applications.