磁性薄膜振动梁磁强计的降阶建模与优化

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI:10.1109/DTIP.2017.7984462

T. Perrier, R. Lévy, P. Kayser, B. Verlhac, P. Lavenus, J. Moulin

{"title":"磁性薄膜振动梁磁强计的降阶建模与优化","authors":"T. Perrier, R. Lévy, P. Kayser, B. Verlhac, P. Lavenus, J. Moulin","doi":"10.1109/DTIP.2017.7984462","DOIUrl":null,"url":null,"abstract":"This paper presents a reduced order model including the resonator and the mechanical moment induced by the thin film on the resonator. The model development is presented as well as its experimental validation with four magnetometer prototypes. This model is then used to investigate the optimization of the thin film position on the resonator as well as the advantages of various shapes of resonators.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Reduced order modeling and optimization of the magnetic thin film vibrating beam magnetometer\",\"authors\":\"T. Perrier, R. Lévy, P. Kayser, B. Verlhac, P. Lavenus, J. Moulin\",\"doi\":\"10.1109/DTIP.2017.7984462\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a reduced order model including the resonator and the mechanical moment induced by the thin film on the resonator. The model development is presented as well as its experimental validation with four magnetometer prototypes. This model is then used to investigate the optimization of the thin film position on the resonator as well as the advantages of various shapes of resonators.\",\"PeriodicalId\":354534,\"journal\":{\"name\":\"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DTIP.2017.7984462\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DTIP.2017.7984462","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

本文提出了一个包含谐振腔和谐振腔上薄膜引起的机械力矩的降阶模型。介绍了模型的发展过程，并用4个磁强计样机进行了实验验证。利用该模型研究了谐振器上薄膜位置的优化以及不同形状谐振器的优点。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Reduced order modeling and optimization of the magnetic thin film vibrating beam magnetometer

This paper presents a reduced order model including the resonator and the mechanical moment induced by the thin film on the resonator. The model development is presented as well as its experimental validation with four magnetometer prototypes. This model is then used to investigate the optimization of the thin film position on the resonator as well as the advantages of various shapes of resonators.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

自引率

0.00%

发文量