High-resolution interferometry with Nd:YAG laser for local probe microscopy

We present a system of positioning a sample for various types of local probe microscopes with interferometric measurement of displacement. The positioning extends significantly the field of view of the local probe microscopy where not only the probe can be displaced over a small range by piezoelectric transducers but the sample can be positioned over a larger scale. The stage allows positioning with nanometer resolution in all three axes under a closed loop control with position detection via capacitive sensors. Interferometric system monitoring all six degrees of freedom of the stage ensures full metrological traceability of the positioning to the fundamental etalon of length and improves resolution and overall precision of the displacement monitoring.