Y.K. Lu, W. Zhu, Y. Zhang, H. Lu, R. Gopalkrishnan
{"title":"激光MBE生长用于栅极介质的hfo2纳米薄膜","authors":"Y.K. Lu, W. Zhu, Y. Zhang, H. Lu, R. Gopalkrishnan","doi":"10.1109/NANOEL.2006.1609728","DOIUrl":null,"url":null,"abstract":"High-k hafnium oxide thin films with equivalent of thickness (EOT) to SiO<inf>2</inf>of about 1 – 2 nm were deposited on p-type","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"HfO2Nano-thin Films Grown by Laser MBE for Gate Dielectric Application\",\"authors\":\"Y.K. Lu, W. Zhu, Y. Zhang, H. Lu, R. Gopalkrishnan\",\"doi\":\"10.1109/NANOEL.2006.1609728\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"High-k hafnium oxide thin films with equivalent of thickness (EOT) to SiO<inf>2</inf>of about 1 – 2 nm were deposited on p-type\",\"PeriodicalId\":220722,\"journal\":{\"name\":\"2006 IEEE Conference on Emerging Technologies - Nanoelectronics\",\"volume\":\"28 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-03-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 IEEE Conference on Emerging Technologies - Nanoelectronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NANOEL.2006.1609728\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANOEL.2006.1609728","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}