初步校准系统数据库的建立

International Workshops and Tutorials on Electron Devices and Materials Pub Date : 2006-07-01 DOI:10.1109/SIBEDM.2006.231664

A. S. Korolyova, E. S. Pjankov

{"title":"初步校准系统数据库的建立","authors":"A. S. Korolyova, E. S. Pjankov","doi":"10.1109/SIBEDM.2006.231664","DOIUrl":null,"url":null,"abstract":"Calibration of models is a necessary and integral process in modeling of IC manufacturing techniques. In this work the selection, research and analysis of information which is to be considered during the performance of modeling have been carried out and the technique of preliminary calibration is developed","PeriodicalId":151587,"journal":{"name":"International Workshops and Tutorials on Electron Devices and Materials","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Creation of the Database for Preliminary Calibration System\",\"authors\":\"A. S. Korolyova, E. S. Pjankov\",\"doi\":\"10.1109/SIBEDM.2006.231664\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Calibration of models is a necessary and integral process in modeling of IC manufacturing techniques. In this work the selection, research and analysis of information which is to be considered during the performance of modeling have been carried out and the technique of preliminary calibration is developed\",\"PeriodicalId\":151587,\"journal\":{\"name\":\"International Workshops and Tutorials on Electron Devices and Materials\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Workshops and Tutorials on Electron Devices and Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SIBEDM.2006.231664\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Workshops and Tutorials on Electron Devices and Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SIBEDM.2006.231664","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

在集成电路制造技术建模中，模型标定是一个必要的、不可缺少的过程。本文对建模过程中需要考虑的信息进行了选择、研究和分析，并开发了初步标定技术

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Creation of the Database for Preliminary Calibration System

Calibration of models is a necessary and integral process in modeling of IC manufacturing techniques. In this work the selection, research and analysis of information which is to be considered during the performance of modeling have been carried out and the technique of preliminary calibration is developed

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

International Workshops and Tutorials on Electron Devices and Materials

自引率

0.00%

发文量